In the field of semiconductor manufacturing, which requires extremely high precision and strict process environments, the selection of each component and material directly affects the performance and yield of the final product. Quartz tube, as a crucial foundational material, plays an indispensable role in it. As a customized quartz product manufacturer with years of experience in foreign trade, we will explore from an objective and professional perspective why quartz tubes have become the preferred choice in the semiconductor industry.

The core application of quartz tubes in the semiconductor industry

Quartz tube is not an ordinary glass tube, it is a special industrial glass made of high-purity silicon dioxide (SiO ₂). We can see its presence in multiple key processes of semiconductor manufacturing:

High temperature oxidation and diffusion: In chip manufacturing, it is necessary to grow a layer of silicon dioxide film on the surface of the silicon wafer as a mask or insulating layer. Quartz tubes are used as furnace tubes for carrying silicon wafers and conducting high-temperature (usually above 1000 ℃) processes because they can withstand such extreme temperatures without deformation or pollution.

Low pressure chemical vapor deposition (LPCVD): Various thin films, such as polycrystalline silicon, silicon nitride, etc., are deposited on the surface of silicon wafers through chemical reactions inside a quartz furnace tube. The purity and stability of quartz tubes are prerequisites for ensuring the uniformity and consistency of the thin film.

Crystal boat and carrier: Components such as crystal boats and brackets used to carry and fix silicon wafers are often made of quartz material to ensure that impurities are not introduced into the parts in contact with the silicon wafer during the entire high-temperature process.

Optical fiber and light source system: In equipment such as lithography machines, high-purity quartz tubes are used to transmit light of specific wavelengths, and their excellent optical performance is crucial.

Excellent product advantages of quartz tubes

The semiconductor industry chooses quartz tubes based on their irreplaceable physical and chemical properties:

1. Extremely high thermal stability: The softening point of quartz glass is as high as 1730 ℃, and it can work normally in high temperature environments above 1000 ℃ for a long time. The coefficient of thermal expansion is extremely low, and the thermal shock resistance is excellent. It can withstand rapid heating and cooling during the process.

2. Excellent chemical purity and inertness: We use carefully selected high-purity natural quartz sand or synthetic raw materials to ensure that the product has extremely low levels of metal impurities. Quartz tubes do not react with the majority of acidic substances (except hydrofluoric acid and hot phosphoric acid) at high temperatures, avoiding contamination of the wafer during the process.

3. Excellent optical performance: Quartz tubes have high transmittance for broad-spectrum light from ultraviolet to infrared, which is crucial for semiconductor lithography and detection processes that rely on precise light.

4. Good electrical insulation: Quartz tubes can still maintain excellent insulation performance at high frequencies and temperatures, ensuring the safe and stable operation of equipment.

5. High mechanical strength and long service life: After precision machining and annealing treatment, our quartz tubes have sufficient mechanical strength, can resist certain physical stresses, have a long service life, and reduce customers' comprehensive operating costs.

What key problems can quartz tubes solve?

Addressing pollution issues: Low purity materials can release metal ions at high temperatures, contaminating wafers and leading to device performance failure. High purity quartz tubes fundamentally eliminate pollution sources.

Addressing deformation and failure issues: Ordinary materials can soften and deform at high temperatures, leading to process failures and even equipment damage. The ultra-high temperature resistance of quartz tubes ensures the dimensional stability and process repeatability of the process chamber.

Solving the problem of process consistency: The excellent thermal uniformity and chemical stability of quartz tubes ensure that each batch of wafers can be processed in almost the same environment, thereby improving the yield of the entire production line.

Why choose us? ——Your global quartz solution partner

When choosing a quartz tube supplier, experience, technology, and customization capabilities are the core considerations. We are able to become a reliable partner for numerous semiconductor equipment manufacturers and vendors worldwide due to the following reasons:

Deep customization capability: We have a deep understanding of the differences in semiconductor processes. Whether it's special sizes, shapes, openings, or formula adjustments for specific processes such as UV transmission and ultra-high temperature environments, we can provide customized quartz tube solutions.

Strict quality control: From raw materials entering the factory to finished products leaving the factory, we implement a rigorous quality inspection system that runs through the entire process. We use advanced optical testing, dimensional inspection, and laboratory analysis equipment to ensure that the purity, size, and performance of each quartz tube meet semiconductor grade standards.

Professional technical support: Our engineering team has a deep understanding of the application of quartz materials in semiconductors, and can provide customers with early technical consultation, problem diagnosis during use, and optimization suggestions, becoming your extended technical team.

Global supply chain and stable delivery: As a professional foreign trade manufacturer, we have efficient logistics and customs clearance experience to ensure the safe and timely delivery of products to customers worldwide.

Customer real case (anonymous)

We once collaborated with a semiconductor equipment manufacturer from Europe. The customer encountered the problem of uneven deposition of thin films in their new LPCVD equipment, which seriously affected the market promotion of the new equipment.

After joint diagnosis by our technical team, it was found that the problem lies in the uneven microstructure of the inner wall of the quartz furnace tube from its original supplier, which releases trace gases under long-term high temperature and interferes with the deposition atmosphere. We have customized and developed a high-purity synthetic quartz tube for our clients using a special surface treatment process.

After replacing our product:

The uniformity of the film has been improved by over 15%, fully meeting the design specifications.

The service life of quartz tubes has been extended by about 30%, reducing the frequency of equipment maintenance and overall costs for customers.

Customer feedback: The new equipment has a wider process window and greatly enhanced stability, successfully helping it open up the market.

This case fully demonstrates how important a reliable and high-performance quartz component is to solve complex semiconductor process problems.

The progress of semiconductor manufacturing cannot be separated from the pursuit of excellence in every basic material. We are committed to providing the most reliable and professional customized quartz tubes and products for the global semiconductor industry.

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Luverre Quartz is a manufacturer specializing in quartz tubes and other quartz items.We have over 18 years experience with the production of quartz tubes, we will be your reliable partner on quartz tubes and other quartz items.

Luverre Quartz can manufacture customized quartz tubes in various shapes, such as spiral, square, round, with processing including cutting, bending, welding, etc., and available in different colors, such as transparent quartz tubes, opaque quartz tubes, milky white quartz tubes, red quartz tubes, and so on.