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High Purity Semiconductor Heat Treatment Furnace Process Quartz Glass Tube

  • High purity semiconductor heat treatment furnace process quartz glass tube

  • High purity semiconductor heat treatment furnace process quartz glass tube is a very important material in the semiconductor manufacturing process.

  • LUVERRE quartz

  • 99.99%

  • Inner with Vacuum PVC bag and then wrapped with air bubble film, outer with wooden box.

  • as per customer's requirement

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High purity semiconductor heat treatment furnace process quartz glass tube


High purity semiconductor heat treatment furnace process quartz glass tube is a very important material in the semiconductor manufacturing process. This type of quartz glass tube is mainly used in the heat treatment process of semiconductor manufacturing, such as diffusion furnaces, oxidation furnaces, etc.


High purity semiconductor heat treatment furnace process quartz glass tube


Material characteristics: The high-purity semiconductor heat treatment furnace process quartz glass tube is mainly made of high-purity silicon dioxide, which has excellent mechanical, thermal, optical, and electrical properties. Due to its unique microstructure, quartz glass tubes have excellent spectral transparency, extremely low thermal expansion coefficient and conductivity, as well as outstanding radiation resistance and long lifespan under extreme conditions.

Application areas: Semiconductor quartz glass is widely used in semiconductor, photovoltaic, optical fiber, electric light source and other fields, among which the application scale in the semiconductor field is the largest, accounting for up to 50%. Especially in the chip manufacturing process, which is the most valuable field in the semiconductor industry, the requirements for related materials are very strict.

Product features: Semiconductor grade quartz tubes have high purity, low hydroxyl groups, and high temperature resistance, making them an ideal choice for processing and processing semiconductor materials. For example, quartz tubes in diffusion furnaces generally require high purity for inlet and outlet, ensuring uniform gas mixing and thus affecting preparation efficiency.

Manufacturing process: The production process of semiconductor quartz glass is complex and involves multiple technologies. For example, during the manufacturing process, special processing techniques may be required to ensure the purity, thermal shock resistance, and ability to withstand extreme temperature conditions of the quartz tube.

Product specifications: The outer diameter range, wall thickness deviation, wall deviation, ellipticity, and curvature of semiconductor grade quartz tubes are all specified in detail to ensure their performance and application stability.


quartz properties


The high-purity semiconductor heat treatment furnace process plays an important role in the semiconductor manufacturing field, and its unique material properties and application performance make it an ideal choice for high-temperature reaction processes.


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