In the world of precision and complex semiconductor manufacturing, the choice of each material is directly related to the yield, performance, and reliability of the final product of the chip. Quartz tube, as a key component with high purity and high temperature resistance, plays an indispensable role in many core process links.

The core application of quartz tube in semiconductor manufacturing

Quartz tube is not an ordinary glass tube, it is a special material made of high-purity silicon dioxide, which has excellent physical and chemical stability. In the semiconductor field, it is mainly applied in the following key areas:

1. High temperature oxidation process: In chip manufacturing, it is necessary to grow a high-quality silicon dioxide insulation layer or mask layer on the surface of the silicon wafer. As the core furnace tube of horizontal or vertical diffusion furnaces, quartz tubes need to withstand high temperature environments above 1200 ° C for a long time, providing a pure reaction chamber for the reaction between silicon wafers and oxygen/water vapor, ensuring the uniformity and purity of the oxide layer.

2. Diffusion doping process: This process involves doping specific impurities (such as boron and phosphorus) into silicon wafers at high temperatures to form PN junctions. During this process, the quartz tube must resist corrosion from the doping source gas and prevent any metal ion contamination, otherwise it will seriously affect the electrical characteristics of the chip.

3. Low pressure chemical vapor deposition (LPCVD): used to deposit thin films such as silicon nitride and polycrystalline silicon on wafers. The quartz tube serves as a reaction chamber here, and its inherent purity and resistance to deformation at high temperatures are prerequisites for ensuring uniform and consistent deposition of thin films.

4. Device packaging: For some high-end power devices or optoelectronic devices, the chip needs to be placed in a quartz tube filled with inert gas to provide a permanent, pollution-free sealed protection environment.

The demanding requirements and product advantages of semiconductor grade quartz tubes

The demand for quartz tubes in the semiconductor industry goes far beyond "high temperature resistance", and its requirements can be summarized as "high, pure, stable, and accurate".

Requirement 1: Extremely high purity and low trace elements

Industry pain points: Any trace amount of alkali metal (such as sodium, potassium) or heavy metal (such as iron, copper) impurities can diffuse into silicon wafers at high temperatures, forming fatal defect centers that can cause device leakage and failure.

Our product advantage: We use arc melting method to prepare high-purity quartz sand, ensuring that the hydroxyl (OH ⁻) content and metal impurity content of the quartz tube main material reach ppb (parts per billion) level, far higher than ordinary industrial grade quartz tubes, and eliminating pollution sources from the source.

Requirement 2: Excellent resistance to high temperature deformation

Industry pain point: In long-term high-temperature processes, ordinary quartz glass may soften, sag, or deform due to a decrease in viscosity, resulting in uneven airflow inside the furnace tube and reduced process repeatability.

Our product advantages: Our quartz tubes have extremely high softening points and excellent viscosity temperature characteristics, maintaining excellent shape stability even at sustained high temperatures of 1300 ° C, ensuring stable and consistent process windows.

Requirement 3: Excellent thermal shock stability and low thermal expansion

Industry pain points: During rapid heating and cooling processes, thermal stress can cause quartz tubes to rupture, resulting in production interruptions and significant economic losses.

Our product advantage: The thermal expansion coefficient of quartz material itself is extremely low. We have further eliminated the internal stress of quartz tubes through sophisticated annealing processes, enabling them to withstand drastic temperature changes without easily exploding, thereby improving equipment utilization and production safety.

Requirement 4: Accurate size and customization capability

Industry pain points: Different models of diffusion furnaces and LPCVD equipment have extremely precise requirements for the diameter, length, wall thickness, flange interface, etc. of quartz tubes.

Our product advantage: We focus on high-precision customized production. We can strictly control tolerances for non-standard customized sizes and provide professional secondary processing services such as opening, bending, welding, etc. to ensure perfect matching between quartz tubes and equipment.

Why choose us?

Among global quartz product suppliers, we stand out with the following core advantages:

Vertically integrated production capacity: From raw material purification to finished product processing, we have achieved full process control to ensure controllable quality, optimized costs, and stable delivery times.

Strict quality assurance system: We have established a dust-free workshop that meets the standards of the semiconductor industry, equipped with advanced testing equipment, and conduct strict physical performance and chemical purity inspections on every batch of products leaving the factory.

Deep technical support and experience: Our engineering team is well versed in semiconductor manufacturing processes and can provide customers with forward-looking selection recommendations and fault solutions. They are not only suppliers, but also technical partners.

Global service network: As a long-term enterprise engaged in foreign trade, we are familiar with international trade processes and can provide fast logistics support and professional after-sales service to global customers.

Customer real case (anonymous)

We have collaborated with a well-known power semiconductor manufacturer in Southeast Asia. The customer frequently encountered small deformations in the quartz tube after continuous operation for several weeks during their high-temperature annealing process, resulting in uneven temperature fields inside the furnace tube and fluctuations in product yield exceeding 5%.

Our solution: After on-site condition analysis and sample testing, we found that the quartz tube used by the customer has insufficient high-temperature creep resistance. We have customized and developed a quartz tube material with higher viscosity for it, and optimized its support structure design.

Final effect: After replacing our customized quartz tube, the average service life of the customer's quartz tube was extended from 3 months to 8 months, and the process stability was greatly improved. The yield fluctuation in this link was controlled within 1%, bringing significant economic benefits to the customer.

The progress of semiconductor manufacturing cannot be separated from the refinement of every basic component. Although the quartz tube is small, it bears a great responsibility. Choosing a reliable, professional, and innovative quartz tube supplier is the key to ensuring the stability and efficiency of your production line.

What problems or challenges have you encountered during the use of your product? Welcome to leave a message and communicate with us. Our team is happy to provide you with a solution.

Luverre Quartz can manufacture customized quartz tubes in various shapes, such as spiral, square, round, with processing including cutting, bending, welding, etc., and available in different colors, such as transparent quartz tubes, opaque quartz tubes, milky white quartz tubes, red quartz tubes, and so on.