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E: nick@luverrequartz.com
E: nick@luverrequartz.com
1st floor Runlian industrial center No. 116 QuFeng Rd., Haizhou Economic and technological development zone Lianyungang City, Jiangsu Province, China 222062
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Heat resistant irregular semiconductor quartz heating tube accessories
Heat resistant irregular shaped semiconductor quartz heating tube accessories, as a highly customized heat source component, are solving many bottlenecks of traditional heating elements in complex process environments with their excellent physical and chemical properties.
LUVERRE quartz
99.99%
Inner with Vacuum PVC bag and then wrapped with air bubble film, outer with wooden box.
as per customer's requirement
In high-end manufacturing fields such as semiconductors, photovoltaics, and liquid crystal displays, precise, stable, and reliable heat treatment is the core link to ensure product yield and performance. Heat resistant irregular shaped semiconductor quartz heating tube accessories, as a highly customized heat source component, are solving many bottlenecks of traditional heating elements in complex process environments with their excellent physical and chemical properties.
Product definition: What is heat-resistant shaped semiconductor quartz heating tube accessory?
Heat resistant irregular shaped semiconductor quartz heating tube accessories do not refer to a single standard component, but rather a type of quartz glass heating component designed non-standard according to the cavity structure and heating requirements of specific semiconductor process equipment. Its core features are as follows:
Material: Made of high-purity (usually ≥ 99.99%) synthetic quartz glass. This material has an extremely low coefficient of thermal expansion, allowing it to withstand drastic temperature changes without breaking.
Heat resistance: The long-term working temperature can reach above 1100 ° C, and it can withstand higher temperatures in the short term, meeting the temperature requirements of most semiconductor diffusion, oxidation, and annealing processes.
Characteristic of "Alien": Different from ordinary straight pipes or U-shaped pipes, its shape can be a complex three-dimensional configuration, such as spiral, planar array, polygonal surround, curved surface with specific curvature, etc., aiming to achieve optimal spatial matching and thermal field distribution with the process chamber.
This accessory is usually tightly combined with resistance wires (such as tungsten wire, Kantar alloy wire), generating infrared radiation through electrical energy to achieve efficient and uniform heating of heated objects such as wafers.
Core advantage: Why can it withstand harsh semiconductor environments?
1. Extremely high thermal stability and thermal shock resistance
The thermal expansion coefficient of synthetic quartz glass is extremely small, and it can effectively resist deformation or cracking caused by thermal stress during the rapid temperature rise and fall process of equipment start-up/stop, ensuring the safety and service life of equipment operation.
2. Excellent spectral transmittance and infrared radiation efficiency
High purity quartz glass has high transmittance in the infrared band (especially 2.5-4.0 μ m), allowing the thermal energy generated by the internal heating element to efficiently penetrate the tube wall in the form of infrared radiation, directly acting on the heated object, with high thermal efficiency and rapid response.
3. Excellent chemical purity and anti pollution ability
Corrosive gases (such as Cl ₂, HCl, HF, etc.) and high-temperature environments are often present in semiconductor process environments. High purity quartz glass itself is an inert material that does not react with process gases, avoiding the release of metal pollutants and ensuring the purity of wafers, which is crucial for nanoscale processes.
4. Highly customized design flexibility
One of its biggest advantages is the 'alien' design. Engineers can design the most suitable shape based on the unique cavity structure of diffusion furnace tubes, PECVD, MOCVD and other equipment, thereby constructing a uniform and stable high-temperature thermal field in a limited space, which cannot be achieved by standard heating tubes.
5. Long lifespan and low maintenance costs
Under the correct operating environment, quartz heating tubes are not easily aged or deformed, and their lifespan is much longer than many metal heating elements, reducing the frequency of equipment shutdown and replacement, and lowering overall maintenance costs.
Key application scenarios
Heat resistant irregular quartz heating tube accessories are key components in the following semiconductor and pan semiconductor manufacturing processes:
Thermal oxidation and diffusion of wafers: In high-temperature furnace tubes, a silicon dioxide insulation layer is formed or doped, and the irregular design ensures the ultimate uniformity of heating throughout the entire wafer.
Chemical vapor deposition: In PECVD and LPCVD equipment, it provides a precise and stable temperature environment for chemical reactions, promoting uniform deposition of thin films.
Rapid thermal annealing: In RTP equipment, millisecond level rapid heating and precise temperature control are required, and the fast response characteristics of quartz tubes are crucial.
LED and display panel manufacturing: growing GaN epitaxial layers in MOCVD equipment or providing uniform heat sources in OLED evaporation equipment.
Photovoltaic industry: providing high temperature environment in the processes of polycrystalline silicon ingot casting, monocrystalline silicon drawing, and solar cell sintering.
Problem solved: From process bottleneck to technological breakthrough
The application of this accessory directly addresses and solves multiple core challenges in semiconductor manufacturing:
1. Solve the problem of thermal field uniformity: By customizing the irregular structure, the heat loss at the edge of the device cavity is compensated, greatly improving the temperature uniformity of the entire heating area, directly improving the performance consistency and yield of the chip.
2. Overcoming spatial limitations and challenges: In compact and clustered process equipment, shaped tubes can be perfectly embedded into complex mechanical structures, achieving efficient heating that traditional heating elements cannot arrange.
3. Reduce the risk of product contamination: Its high purity and chemical inertness fundamentally eliminate metal ion and particle contamination caused by component volatilization or reaction in the process chamber during heating.
4. Improve process reliability and repeatability: Excellent thermal stability and long lifespan ensure that the production process remains highly consistent after thousands of cycles, providing a solid foundation for large-scale production.
5. Support the evolution of advanced processes: As semiconductor technology nodes continue to shrink, the requirements for controlling thermal budgets become increasingly stringent. Heat resistant irregular shaped quartz heating tubes can provide more precise and localized heating solutions, meeting the requirements of advanced processes such as 3nm and 5nm for heat treatment.
The heat-resistant shaped semiconductor quartz heating tube accessory has evolved from a simple heating element to a key subsystem that determines the performance of high-end manufacturing equipment. It provides clean, uniform, stable, and customizable heat source solutions for the semiconductor industry through the combination of materials science and precision engineering.
Luverre Quartz manufactures and sells a wide range of high quality quartz glass, including quartz tubes, quartz plates, quartz rods, quartz windows, quartz crucibles, quartz boats, quartz flanges, quartz beakers, quartz glass instruments, and more. We can meet all kinds of customized requirements for quartz glass products.
In high-end manufacturing fields such as semiconductors, photovoltaics, and liquid crystal displays, precise, stable, and reliable heat treatment is the core link to ensure product yield and performance. Heat resistant irregular shaped semiconductor quartz heating tube accessories, as a highly customized heat source component, are solving many bottlenecks of traditional heating elements in complex process environments with their excellent physical and chemical properties.
Product definition: What is heat-resistant shaped semiconductor quartz heating tube accessory?
Heat resistant irregular shaped semiconductor quartz heating tube accessories do not refer to a single standard component, but rather a type of quartz glass heating component designed non-standard according to the cavity structure and heating requirements of specific semiconductor process equipment. Its core features are as follows:
Material: Made of high-purity (usually ≥ 99.99%) synthetic quartz glass. This material has an extremely low coefficient of thermal expansion, allowing it to withstand drastic temperature changes without breaking.
Heat resistance: The long-term working temperature can reach above 1100 ° C, and it can withstand higher temperatures in the short term, meeting the temperature requirements of most semiconductor diffusion, oxidation, and annealing processes.
Characteristic of "Alien": Different from ordinary straight pipes or U-shaped pipes, its shape can be a complex three-dimensional configuration, such as spiral, planar array, polygonal surround, curved surface with specific curvature, etc., aiming to achieve optimal spatial matching and thermal field distribution with the process chamber.
This accessory is usually tightly combined with resistance wires (such as tungsten wire, Kantar alloy wire), generating infrared radiation through electrical energy to achieve efficient and uniform heating of heated objects such as wafers.
Core advantage: Why can it withstand harsh semiconductor environments?
1. Extremely high thermal stability and thermal shock resistance
The thermal expansion coefficient of synthetic quartz glass is extremely small, and it can effectively resist deformation or cracking caused by thermal stress during the rapid temperature rise and fall process of equipment start-up/stop, ensuring the safety and service life of equipment operation.
2. Excellent spectral transmittance and infrared radiation efficiency
High purity quartz glass has high transmittance in the infrared band (especially 2.5-4.0 μ m), allowing the thermal energy generated by the internal heating element to efficiently penetrate the tube wall in the form of infrared radiation, directly acting on the heated object, with high thermal efficiency and rapid response.
3. Excellent chemical purity and anti pollution ability
Corrosive gases (such as Cl ₂, HCl, HF, etc.) and high-temperature environments are often present in semiconductor process environments. High purity quartz glass itself is an inert material that does not react with process gases, avoiding the release of metal pollutants and ensuring the purity of wafers, which is crucial for nanoscale processes.
4. Highly customized design flexibility
One of its biggest advantages is the 'alien' design. Engineers can design the most suitable shape based on the unique cavity structure of diffusion furnace tubes, PECVD, MOCVD and other equipment, thereby constructing a uniform and stable high-temperature thermal field in a limited space, which cannot be achieved by standard heating tubes.
5. Long lifespan and low maintenance costs
Under the correct operating environment, quartz heating tubes are not easily aged or deformed, and their lifespan is much longer than many metal heating elements, reducing the frequency of equipment shutdown and replacement, and lowering overall maintenance costs.
Key application scenarios
Heat resistant irregular quartz heating tube accessories are key components in the following semiconductor and pan semiconductor manufacturing processes:
Thermal oxidation and diffusion of wafers: In high-temperature furnace tubes, a silicon dioxide insulation layer is formed or doped, and the irregular design ensures the ultimate uniformity of heating throughout the entire wafer.
Chemical vapor deposition: In PECVD and LPCVD equipment, it provides a precise and stable temperature environment for chemical reactions, promoting uniform deposition of thin films.
Rapid thermal annealing: In RTP equipment, millisecond level rapid heating and precise temperature control are required, and the fast response characteristics of quartz tubes are crucial.
LED and display panel manufacturing: growing GaN epitaxial layers in MOCVD equipment or providing uniform heat sources in OLED evaporation equipment.
Photovoltaic industry: providing high temperature environment in the processes of polycrystalline silicon ingot casting, monocrystalline silicon drawing, and solar cell sintering.
Problem solved: From process bottleneck to technological breakthrough
The application of this accessory directly addresses and solves multiple core challenges in semiconductor manufacturing:
1. Solve the problem of thermal field uniformity: By customizing the irregular structure, the heat loss at the edge of the device cavity is compensated, greatly improving the temperature uniformity of the entire heating area, directly improving the performance consistency and yield of the chip.
2. Overcoming spatial limitations and challenges: In compact and clustered process equipment, shaped tubes can be perfectly embedded into complex mechanical structures, achieving efficient heating that traditional heating elements cannot arrange.
3. Reduce the risk of product contamination: Its high purity and chemical inertness fundamentally eliminate metal ion and particle contamination caused by component volatilization or reaction in the process chamber during heating.
4. Improve process reliability and repeatability: Excellent thermal stability and long lifespan ensure that the production process remains highly consistent after thousands of cycles, providing a solid foundation for large-scale production.
5. Support the evolution of advanced processes: As semiconductor technology nodes continue to shrink, the requirements for controlling thermal budgets become increasingly stringent. Heat resistant irregular shaped quartz heating tubes can provide more precise and localized heating solutions, meeting the requirements of advanced processes such as 3nm and 5nm for heat treatment.
The heat-resistant shaped semiconductor quartz heating tube accessory has evolved from a simple heating element to a key subsystem that determines the performance of high-end manufacturing equipment. It provides clean, uniform, stable, and customizable heat source solutions for the semiconductor industry through the combination of materials science and precision engineering.
Luverre Quartz manufactures and sells a wide range of high quality quartz glass, including quartz tubes, quartz plates, quartz rods, quartz windows, quartz crucibles, quartz boats, quartz flanges, quartz beakers, quartz glass instruments, and more. We can meet all kinds of customized requirements for quartz glass products.
