T: +86-518-85528012
E: nick@luverrequartz.com
E: nick@luverrequartz.com
1st floor Runlian industrial center No. 116 QuFeng Rd., Haizhou Economic and technological development zone Lianyungang City, Jiangsu Province, China 222062
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Semiconductor quartz glass flange accessories
Semiconductor quartz glass flange accessories are core structural components used in semiconductor manufacturing equipment to connect
LUVERRE quartz
99.99%
Inner with Vacuum PVC bag and then wrapped with air bubble film, outer with wooden box.
as per customer's requirement
Semiconductor quartz glass flange accessories are core structural components used in semiconductor manufacturing equipment to connect, seal and guide process gases or maintain the vacuum environment of reaction chambers. Precisely manufactured from high-purity synthetic quartz glass, it demonstrates irreplaceable physical and chemical stability under extremely harsh process conditions such as high temperatures, strong corrosiveness, and high plasma density, serving as the cornerstone for ensuring the yield of chip manufacturing and the reliability of equipment.
Core product advantages: Tailored for cutting-edge manufacturing processes
1. Ultimate purity and low precipitation
Material purity: High-grade synthetic quartz glass is adopted, with extremely low content of metal ion impurities (such as Na, K, Fe, etc.) (usually less than 1ppm), fundamentally eliminating wafer defects caused by self-contamination of accessories.
Low alpha particle release: For advanced processes (such as DRAM, 3D NAND), the inherent low alpha particle characteristic of quartz glass effectively prevents soft errors in the wafer circuit and ensures the reliability of the device.
2. Excellent thermal stability and thermal shock resistance
High-temperature resistance: The softening point is as high as over 1700°C, and it can operate stably for a long time at process temperatures above 1200°C without deformation or volatilization.
Thermal shock resistance: With an extremely low coefficient of thermal expansion (approximately 5.5×10⁻⁷/°C), it can withstand rapid heating and cooling during the process, effectively preventing cracking.
3. Excellent chemical inertness
It has extremely strong resistance to the vast majority of acids (except hydrofluoric acid and hot phosphoric acid), halogen gases (such as Cl₂, F₂), and highly corrosive plasmas, ensuring that it is not corroded during etching, CVD, diffusion and other processes, and extending its service life.
4. Excellent optical and electrical properties
High light transmittance: It has excellent light transmittance across a wide spectral range from ultraviolet to infrared, making it suitable for processes that require optical monitoring or ultraviolet curing.
High dielectric strength: It is an excellent insulator and performs stably in high-voltage and high-frequency plasma environments, preventing arc discharge.
5. Precise dimensional processing capability
Through CNC precision machining, laser cutting and thermoforming technologies, micron-level dimensional tolerances and complex geometries can be achieved, ensuring perfect matching with other components of the equipment and vacuum sealing.
Main application scenarios
Quartz glass flange accessories are widely used in key equipment of semiconductor front-end manufacturing:
Diffusion process: As the flange of the furnace tube, it bears the crystal boat and introduces doped gas at high temperature.
Chemical vapor deposition: In equipment such as LPCVD and PECVD, it serves as a window for the reaction chamber, a gas injection flange or a connecting part.
Dry etching: In ICP and CCP etching machines, it is directly exposed to a highly corrosive plasma environment and is used for chamber top covers, electrode fixation or gas distribution.
Lithography: In steppers or scanners, it is used as a support structure for certain optical systems or mask plates.
Ion implantation: As an insulating and sealing component in bundled wire conduits or chambers.
The pain points of our customers that we can solve
1. Solving the problem of particle contamination: Traditional metal or ordinary ceramic accessories may experience particle shedding under the bombardment of high-temperature plasma. Quartz glass has a smooth and dense surface, strong anti-spalling property, and significantly reduces particle contamination on the wafer.
2. Eliminate the risk of metal contamination: High-purity quartz material fundamentally cuts off the migration path of metal impurities into the process chamber, improving product yield, which is particularly crucial for processes below 90nm.
3. Extend the lifespan of components and reduce total cost of ownership: In highly corrosive environments, quartz flanges have a longer replacement cycle compared to other materials, reducing equipment downtime and spare parts costs.
4. Ensuring process stability and repeatability: Outstanding thermal stability and chemical stability guarantee that each batch of the process is carried out in the same chamber environment, providing a hardware foundation for process repeatability.
5. Addressing the challenges of new processes: As semiconductor processes move towards smaller nodes (such as 3nm and 2nm), the requirements for the purity and stability of materials have become more stringent. Quartz glass is one of the few materials that can meet these cutting-edge demands.
Customized services and technical support
We are well aware of the diversity of semiconductor equipment, and thus offer comprehensive customized services
Processing based on drawings: Precise processing and manufacturing are carried out according to the 2D/3D drawings provided by the customer.
Material selection consultation: For specific processes (such as ultra-high temperature, specific corrosive gases), recommend the most suitable quartz glass grades (such as GE-214, Suprasil®, etc.).
Collaborative design and optimization: Our team of engineers can work closely with your equipment design team to optimize the flange structure from the initial stage, enhancing performance, reliability and maintainability.
Surface treatment and cleaning: We offer a variety of surface treatment solutions including fire polishing, and follow strict semiconductor-grade cleaning and packaging processes to ensure that the products are ready for use upon leaving the factory.
In the journey of semiconductor manufacturing towards higher precision and more complex processes, the reliability of every component is of vital importance. Our quartz glass flange accessories, with their inherent material advantages and outstanding performance in extreme environments, have become a reliable choice for ensuring the stable operation of your equipment and the high yield of chips. We are committed to providing solid technical support for the global semiconductor industry through professional products and customized services.
Luverre Quartz manufactures and sells a wide range of high quality quartz glass, including quartz tubes, quartz plates, quartz rods, quartz windows, quartz crucibles, quartz boats, quartz flanges, quartz beakers, quartz glass instruments, and more. We can meet all kinds of customized requirements for quartz glass products.
Semiconductor quartz glass flange accessories are core structural components used in semiconductor manufacturing equipment to connect, seal and guide process gases or maintain the vacuum environment of reaction chambers. Precisely manufactured from high-purity synthetic quartz glass, it demonstrates irreplaceable physical and chemical stability under extremely harsh process conditions such as high temperatures, strong corrosiveness, and high plasma density, serving as the cornerstone for ensuring the yield of chip manufacturing and the reliability of equipment.
Core product advantages: Tailored for cutting-edge manufacturing processes
1. Ultimate purity and low precipitation
Material purity: High-grade synthetic quartz glass is adopted, with extremely low content of metal ion impurities (such as Na, K, Fe, etc.) (usually less than 1ppm), fundamentally eliminating wafer defects caused by self-contamination of accessories.
Low alpha particle release: For advanced processes (such as DRAM, 3D NAND), the inherent low alpha particle characteristic of quartz glass effectively prevents soft errors in the wafer circuit and ensures the reliability of the device.
2. Excellent thermal stability and thermal shock resistance
High-temperature resistance: The softening point is as high as over 1700°C, and it can operate stably for a long time at process temperatures above 1200°C without deformation or volatilization.
Thermal shock resistance: With an extremely low coefficient of thermal expansion (approximately 5.5×10⁻⁷/°C), it can withstand rapid heating and cooling during the process, effectively preventing cracking.
3. Excellent chemical inertness
It has extremely strong resistance to the vast majority of acids (except hydrofluoric acid and hot phosphoric acid), halogen gases (such as Cl₂, F₂), and highly corrosive plasmas, ensuring that it is not corroded during etching, CVD, diffusion and other processes, and extending its service life.
4. Excellent optical and electrical properties
High light transmittance: It has excellent light transmittance across a wide spectral range from ultraviolet to infrared, making it suitable for processes that require optical monitoring or ultraviolet curing.
High dielectric strength: It is an excellent insulator and performs stably in high-voltage and high-frequency plasma environments, preventing arc discharge.
5. Precise dimensional processing capability
Through CNC precision machining, laser cutting and thermoforming technologies, micron-level dimensional tolerances and complex geometries can be achieved, ensuring perfect matching with other components of the equipment and vacuum sealing.
Main application scenarios
Quartz glass flange accessories are widely used in key equipment of semiconductor front-end manufacturing:
Diffusion process: As the flange of the furnace tube, it bears the crystal boat and introduces doped gas at high temperature.
Chemical vapor deposition: In equipment such as LPCVD and PECVD, it serves as a window for the reaction chamber, a gas injection flange or a connecting part.
Dry etching: In ICP and CCP etching machines, it is directly exposed to a highly corrosive plasma environment and is used for chamber top covers, electrode fixation or gas distribution.
Lithography: In steppers or scanners, it is used as a support structure for certain optical systems or mask plates.
Ion implantation: As an insulating and sealing component in bundled wire conduits or chambers.
The pain points of our customers that we can solve
1. Solving the problem of particle contamination: Traditional metal or ordinary ceramic accessories may experience particle shedding under the bombardment of high-temperature plasma. Quartz glass has a smooth and dense surface, strong anti-spalling property, and significantly reduces particle contamination on the wafer.
2. Eliminate the risk of metal contamination: High-purity quartz material fundamentally cuts off the migration path of metal impurities into the process chamber, improving product yield, which is particularly crucial for processes below 90nm.
3. Extend the lifespan of components and reduce total cost of ownership: In highly corrosive environments, quartz flanges have a longer replacement cycle compared to other materials, reducing equipment downtime and spare parts costs.
4. Ensuring process stability and repeatability: Outstanding thermal stability and chemical stability guarantee that each batch of the process is carried out in the same chamber environment, providing a hardware foundation for process repeatability.
5. Addressing the challenges of new processes: As semiconductor processes move towards smaller nodes (such as 3nm and 2nm), the requirements for the purity and stability of materials have become more stringent. Quartz glass is one of the few materials that can meet these cutting-edge demands.
Customized services and technical support
We are well aware of the diversity of semiconductor equipment, and thus offer comprehensive customized services
Processing based on drawings: Precise processing and manufacturing are carried out according to the 2D/3D drawings provided by the customer.
Material selection consultation: For specific processes (such as ultra-high temperature, specific corrosive gases), recommend the most suitable quartz glass grades (such as GE-214, Suprasil®, etc.).
Collaborative design and optimization: Our team of engineers can work closely with your equipment design team to optimize the flange structure from the initial stage, enhancing performance, reliability and maintainability.
Surface treatment and cleaning: We offer a variety of surface treatment solutions including fire polishing, and follow strict semiconductor-grade cleaning and packaging processes to ensure that the products are ready for use upon leaving the factory.
In the journey of semiconductor manufacturing towards higher precision and more complex processes, the reliability of every component is of vital importance. Our quartz glass flange accessories, with their inherent material advantages and outstanding performance in extreme environments, have become a reliable choice for ensuring the stable operation of your equipment and the high yield of chips. We are committed to providing solid technical support for the global semiconductor industry through professional products and customized services.
Luverre Quartz manufactures and sells a wide range of high quality quartz glass, including quartz tubes, quartz plates, quartz rods, quartz windows, quartz crucibles, quartz boats, quartz flanges, quartz beakers, quartz glass instruments, and more. We can meet all kinds of customized requirements for quartz glass products.
