T: +86-518-85528012
E: nick@luverrequartz.com
E: nick@luverrequartz.com
1st floor Runlian industrial center No. 116 QuFeng Rd., Haizhou Economic and technological development zone Lianyungang City, Jiangsu Province, China 222062
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Semiconductor round fused silica tube
The semiconductor circular fused silica tube is a special type of glass tube made of high-purity silica. It features high-temperature resistance (up to over 1100℃)
LUVERRE quartz
99.99%
Inner with Vacuum PVC bag and then wrapped with air bubble film, outer with wooden box.
as per customer's requirement
The semiconductor circular fused silica tube is a special type of glass tube made of high-purity silica. It features high-temperature resistance (up to over 1100℃), good chemical stability, low thermal expansion coefficient, and excellent light transmission performance. It is widely used in epitaxial, diffusion, cleaning and other processes in semiconductor manufacturing and is an indispensable key material for chip production. Its circular cross-section design facilitates sealing with equipment, ensuring a pure process environment.
As a globally leading manufacturer of custom quartz products, we specialize in providing high-performance circular fused quartz tubes for the semiconductor industry. In cutting-edge fields such as chip manufacturing, optical fiber communication, and photovoltaic solar energy, there are nearly demanding requirements for the purity, thermal stability, and geometric accuracy of key materials. Our products are precisely designed to meet these strict standards and are a reliable guarantee for the stability of your processes and the yield of your products.
Core product advantage: Why do our quartz tubes stand out
Our semiconductor-grade circular fused silica tubes are not merely containers but also part of the process. Its outstanding performance is reflected in the following aspects:
1. Ultimate purity and low defect rate
We use top-quality natural quartz sand or synthetic processes to ensure that our products have a silica purity of over 99.99%.
The extremely low hydroxyl content and inherent defects such as bubbles and inclusions effectively prevent contamination of silicon wafers during high-temperature processes, ensuring the stable electrical performance of the chips.
2. Excellent thermal stability and anti-crystallization property:
The softening point of fused quartz is as high as 1730°C, capable of withstanding extreme high temperatures in semiconductor diffusion, oxidation and CVD processes.
It has excellent anti-crystallization performance. Even when used at high temperatures for a long time, the surface will not lose crystallization, thus extending the service life of the quartz tube and reducing equipment downtime.
3. Extremely high geometric accuracy and consistency
We offer strict control over wall thickness uniformity and precise roundness and straightness. This is crucial for the uniform distribution of the temperature field inside the furnace tube and directly affects the uniformity of the film thickness and doping concentration on the wafer.
4. Excellent optical and chemical properties:
It has high transmittance over a wide spectral range from ultraviolet to infrared and is suitable for lithography and related optical applications.
Except for hydrofluoric acid and hot phosphoric acid, it hardly reacts with other acidic substances and has extremely strong corrosion resistance.
Main application scenarios: Empowering cutting-edge technology manufacturing
Our circular fused silica tubes are indispensable core components in the following semiconductor processes:
Hot working process: As diffusion furnace tubes and oxidation furnace tubes, it is used for doping, annealing and thermal oxidation of wafers.
Thin film deposition: It serves as a reaction chamber in LPCVD (Low-pressure Chemical Vapor Deposition) and MOCVD (metal-Organic Chemical Vapor Deposition) equipment.
Lithography and exposure: Optical system components and mask substrate used in high-end lithography machines.
Carriers and accessories: Used for manufacturing wafer carrying tools such as quartz boats and brackets.
What key problems can we solve?
Choosing our quartz tubes means you will effectively address the following industry pain points:
Solving pollution problems: High-purity materials fundamentally eliminate metal ion contamination and particle shedding, enhancing the yield of chips.
Solving the problem of uneven temperature: Precise geometric dimensions ensure the stability of the thermal field inside the furnace tubes, avoiding "cold spots" or "hot spots", and guaranteeing process consistency.
Solving the problem of cost waste: The long service life and anti-crystallization properties reduce the frequency of frequent component replacement, lowering the overall maintenance cost and total cost of ownership.
Solving customization challenges: The rapid response capability for non-standard sizes and shapes helps you quickly achieve new process development and equipment upgrades.
Why choose us? Not only products, but also partners
1. Vertically integrated manufacturing capabilities: From raw material selection to precise processing, cleaning and inspection, we achieve full-process control to ensure quality traceability.
2. Deeply customized professional services: We understand that "standard products" cannot meet all demands. We offer ODM/OEM services and can customize quartz tubes of different diameters, wall thicknesses, lengths and end shapes according to your equipment drawings and process requirements.
3. Strict quality assurance system: Before each batch of products leaves the factory, they undergo multiple strict quality inspections, including geometric dimension measurement, bubble degree detection, and hydroxyl content analysis.
4. Global agile supply chain: We have rich experience in foreign trade and can provide efficient and smooth logistics and customs clearance support for global customers.
Real customer cases bear witness
Case One (A well-known chip foundry in Asia) :
This customer has been plagued by the problem of poor uniformity of film thickness between batches during the oxidation process of wafers at the 90nm process node. After our analysis, it was found that the poor uniformity of the wall thickness of the quartz furnace tubes it used was the cause. We customized high-precision quartz tubes with a wall thickness tolerance controlled within ±0.1mm for them. After the replacement, the uniformity of the wafer film thickness (WIWNU) increased by 35%, significantly improving the product yield.
Case Two (A European semiconductor equipment manufacturer) :
The customer is developing a new generation of MOCVD equipment and requires a quartz reaction tube with an irregular-shaped end connection, which needs to remain stable under high-frequency thermal cycling. We completed the design sampling within three weeks and provided an optimized connection structure. We successfully helped the client pass over 2,000 thermal cycle tests and received high recognition from the client.
Are you troubled by finding reliable high-performance quartz tubes?
Welcome to contact us immediately for sample testing or customized solution consultation. Let's safeguard your next successful project with our professional quartz solutions.
Luverre Quartz can manufacture customized quartz tubes in various shapes, such as spiral, square, round, with processing including cutting, bending, welding, etc., and available in different colors, such as transparent quartz tubes, opaque quartz tubes, milky white quartz tubes, red quartz tubes, and so on.
The semiconductor circular fused silica tube is a special type of glass tube made of high-purity silica. It features high-temperature resistance (up to over 1100℃), good chemical stability, low thermal expansion coefficient, and excellent light transmission performance. It is widely used in epitaxial, diffusion, cleaning and other processes in semiconductor manufacturing and is an indispensable key material for chip production. Its circular cross-section design facilitates sealing with equipment, ensuring a pure process environment.
As a globally leading manufacturer of custom quartz products, we specialize in providing high-performance circular fused quartz tubes for the semiconductor industry. In cutting-edge fields such as chip manufacturing, optical fiber communication, and photovoltaic solar energy, there are nearly demanding requirements for the purity, thermal stability, and geometric accuracy of key materials. Our products are precisely designed to meet these strict standards and are a reliable guarantee for the stability of your processes and the yield of your products.
Core product advantage: Why do our quartz tubes stand out
Our semiconductor-grade circular fused silica tubes are not merely containers but also part of the process. Its outstanding performance is reflected in the following aspects:
1. Ultimate purity and low defect rate
We use top-quality natural quartz sand or synthetic processes to ensure that our products have a silica purity of over 99.99%.
The extremely low hydroxyl content and inherent defects such as bubbles and inclusions effectively prevent contamination of silicon wafers during high-temperature processes, ensuring the stable electrical performance of the chips.
2. Excellent thermal stability and anti-crystallization property:
The softening point of fused quartz is as high as 1730°C, capable of withstanding extreme high temperatures in semiconductor diffusion, oxidation and CVD processes.
It has excellent anti-crystallization performance. Even when used at high temperatures for a long time, the surface will not lose crystallization, thus extending the service life of the quartz tube and reducing equipment downtime.
3. Extremely high geometric accuracy and consistency
We offer strict control over wall thickness uniformity and precise roundness and straightness. This is crucial for the uniform distribution of the temperature field inside the furnace tube and directly affects the uniformity of the film thickness and doping concentration on the wafer.
4. Excellent optical and chemical properties:
It has high transmittance over a wide spectral range from ultraviolet to infrared and is suitable for lithography and related optical applications.
Except for hydrofluoric acid and hot phosphoric acid, it hardly reacts with other acidic substances and has extremely strong corrosion resistance.
Main application scenarios: Empowering cutting-edge technology manufacturing
Our circular fused silica tubes are indispensable core components in the following semiconductor processes:
Hot working process: As diffusion furnace tubes and oxidation furnace tubes, it is used for doping, annealing and thermal oxidation of wafers.
Thin film deposition: It serves as a reaction chamber in LPCVD (Low-pressure Chemical Vapor Deposition) and MOCVD (metal-Organic Chemical Vapor Deposition) equipment.
Lithography and exposure: Optical system components and mask substrate used in high-end lithography machines.
Carriers and accessories: Used for manufacturing wafer carrying tools such as quartz boats and brackets.
What key problems can we solve?
Choosing our quartz tubes means you will effectively address the following industry pain points:
Solving pollution problems: High-purity materials fundamentally eliminate metal ion contamination and particle shedding, enhancing the yield of chips.
Solving the problem of uneven temperature: Precise geometric dimensions ensure the stability of the thermal field inside the furnace tubes, avoiding "cold spots" or "hot spots", and guaranteeing process consistency.
Solving the problem of cost waste: The long service life and anti-crystallization properties reduce the frequency of frequent component replacement, lowering the overall maintenance cost and total cost of ownership.
Solving customization challenges: The rapid response capability for non-standard sizes and shapes helps you quickly achieve new process development and equipment upgrades.
Why choose us? Not only products, but also partners
1. Vertically integrated manufacturing capabilities: From raw material selection to precise processing, cleaning and inspection, we achieve full-process control to ensure quality traceability.
2. Deeply customized professional services: We understand that "standard products" cannot meet all demands. We offer ODM/OEM services and can customize quartz tubes of different diameters, wall thicknesses, lengths and end shapes according to your equipment drawings and process requirements.
3. Strict quality assurance system: Before each batch of products leaves the factory, they undergo multiple strict quality inspections, including geometric dimension measurement, bubble degree detection, and hydroxyl content analysis.
4. Global agile supply chain: We have rich experience in foreign trade and can provide efficient and smooth logistics and customs clearance support for global customers.
Real customer cases bear witness
Case One (A well-known chip foundry in Asia) :
This customer has been plagued by the problem of poor uniformity of film thickness between batches during the oxidation process of wafers at the 90nm process node. After our analysis, it was found that the poor uniformity of the wall thickness of the quartz furnace tubes it used was the cause. We customized high-precision quartz tubes with a wall thickness tolerance controlled within ±0.1mm for them. After the replacement, the uniformity of the wafer film thickness (WIWNU) increased by 35%, significantly improving the product yield.
Case Two (A European semiconductor equipment manufacturer) :
The customer is developing a new generation of MOCVD equipment and requires a quartz reaction tube with an irregular-shaped end connection, which needs to remain stable under high-frequency thermal cycling. We completed the design sampling within three weeks and provided an optimized connection structure. We successfully helped the client pass over 2,000 thermal cycle tests and received high recognition from the client.
Are you troubled by finding reliable high-performance quartz tubes?
Welcome to contact us immediately for sample testing or customized solution consultation. Let's safeguard your next successful project with our professional quartz solutions.
Luverre Quartz can manufacture customized quartz tubes in various shapes, such as spiral, square, round, with processing including cutting, bending, welding, etc., and available in different colors, such as transparent quartz tubes, opaque quartz tubes, milky white quartz tubes, red quartz tubes, and so on.
