T: +86-518-85528012
E: nick@luverrequartz.com
E: nick@luverrequartz.com
1st floor Runlian industrial center No. 116 QuFeng Rd., Haizhou Economic and technological development zone Lianyungang City, Jiangsu Province, China 222062
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Heat-resistant transparent semiconductor quartz boat
The heat-resistant transparent semiconductor quartz boat is a high-performance quartz product specially designed for semiconductor manufacturing processes.
LUVERRE quartz
99.99%
Inner with Vacuum PVC bag and then wrapped with air bubble film, outer with wooden box.
as per customer's requirement
The heat-resistant transparent semiconductor quartz boat is a high-performance quartz product specially designed for semiconductor manufacturing processes. It is mainly used to carry and transport wafers, and is widely used in high-temperature processes such as oxidation, diffusion, CVD deposition, and annealing. Quartz boats play a key role in semiconductor manufacturing due to their excellent high temperature resistance, chemical stability, and transparency.
Material characteristics
(I) High-purity quartz glass
The main material of the quartz boat is high-purity quartz glass (SiO _ 2), which has extremely high purity and very low metal impurity content. This material has the following remarkable properties:
1. High temperature resistance: The softening point temperature of quartz glass is about 1730 ° C, which can be used at 1150 ° C for a long time, and the maximum temperature for a short time can reach 1450 ° C. In high temperature environments, quartz boats can maintain structural stability without deformation or melting.
2. Chemical stability: Quartz glass is highly resistant to most chemical substances (such as acids, alkalis, etc.), and hardly reacts with other acids except hydrofluoric acid. This property allows it to remain stable during high-temperature chemical treatment without causing contamination to the wafer.
3. Transparency: Quartz glass has good light transmission performance in the entire spectral band from ultraviolet to infrared, with a visible light transmittance of more than 93% and a light transmittance of more than 80% in the ultraviolet spectral region. This transparency allows quartz boats to meet the needs of lighting or exposing wafers in certain processes.
4. Thermal stability: High-purity quartz has a very small coefficient of thermal expansion and can withstand intense temperature changes. Even if high-purity quartz is heated to around 1100 ° C, it will not burst when placed in room temperature water.
(II) Impurity control
In the process of producing quartz sand, the raw material of quartz boat, flotation, pickling, chlorination, magnetic separation and other processes are used to control the impurity content. This not only improves the high temperature resistance of the quartz boat, but also reduces the defects caused by impurities, such as bubbles and microparticles, thereby ensuring the performance and quality of the quartz boat.
Product advantage
(I) High temperature stability
Quartz boats can remain stable in high temperature environments for a long time without deformation or damage, and are suitable for a variety of high temperature processes, such as oxidation, diffusion, annealing, etc. This stability is essential to ensure the accuracy and repeatability of semiconductor manufacturing processes.
(II) Chemical inertness
The chemical inertness of the quartz boat prevents it from reacting with reactive gases or chemicals during high-temperature chemical treatment, thus avoiding contamination of the wafer. This property is essential to ensure the high quality and purity of semiconductor devices.
(III) Transparency and optical properties
The transparency of the quartz boat allows it to meet the needs of lighting or exposing the wafer in certain processes. For example, in lithography and exposure processes, the transparency of the quartz boat ensures that the light source accurately shines on the wafer, thus improving the accuracy and efficiency of the process.
(Iv) Thermal stability
The thermal stability of quartz boats allows them to withstand rapid temperature changes without cracking or deformation. This property is important for improving the efficiency and reliability of semiconductor manufacturing processes.
Application scenario
Custom heat-resistant transparent semiconductor quartz boats are widely used in multiple process steps in semiconductor manufacturing, including but not limited to:
1. Oxidation process: The wafer is oxidized at high temperature to form an oxide layer.
2. Diffusion process: Diffusing impurity atoms into a wafer to modify its electrical properties.
3. CVD deposition: Thin films are deposited on the surface of a wafer for the fabrication of semiconductor devices.
4. Annealing process: by heating the material to restore or change its properties, in order to improve the performance of the wafer.
Customized service
We provide customized quartz boat solutions to meet the specific needs of different customers. Customized services include but are not limited to:
1. Size and shape: Customize the size and shape of the quartz boat according to the customer's process requirements.
2. Purity and impurity control: According to different process requirements, different purity grades of quartz boats are provided.
3. Special function design: for example, adding ventilation holes to optimize hot air flow and improve process efficiency.
Heat-resistant transparent semiconductor quartz boats are an indispensable tool in semiconductor manufacturing due to their excellent high temperature resistance, chemical stability and transparency. Our customized services and high-quality products can meet the specific needs of different customers and help the semiconductor industry continue to grow.
Luverre Quartz manufactures and sells a wide range of high quality quartz glass, including quartz tubes, quartz plates, quartz rods, quartz windows, quartz crucibles, quartz boats, quartz flanges, quartz beakers, quartz glass instruments, and more. We can meet all kinds of customized requirements for quartz glass products.
The heat-resistant transparent semiconductor quartz boat is a high-performance quartz product specially designed for semiconductor manufacturing processes. It is mainly used to carry and transport wafers, and is widely used in high-temperature processes such as oxidation, diffusion, CVD deposition, and annealing. Quartz boats play a key role in semiconductor manufacturing due to their excellent high temperature resistance, chemical stability, and transparency.
Material characteristics
(I) High-purity quartz glass
The main material of the quartz boat is high-purity quartz glass (SiO _ 2), which has extremely high purity and very low metal impurity content. This material has the following remarkable properties:
1. High temperature resistance: The softening point temperature of quartz glass is about 1730 ° C, which can be used at 1150 ° C for a long time, and the maximum temperature for a short time can reach 1450 ° C. In high temperature environments, quartz boats can maintain structural stability without deformation or melting.
2. Chemical stability: Quartz glass is highly resistant to most chemical substances (such as acids, alkalis, etc.), and hardly reacts with other acids except hydrofluoric acid. This property allows it to remain stable during high-temperature chemical treatment without causing contamination to the wafer.
3. Transparency: Quartz glass has good light transmission performance in the entire spectral band from ultraviolet to infrared, with a visible light transmittance of more than 93% and a light transmittance of more than 80% in the ultraviolet spectral region. This transparency allows quartz boats to meet the needs of lighting or exposing wafers in certain processes.
4. Thermal stability: High-purity quartz has a very small coefficient of thermal expansion and can withstand intense temperature changes. Even if high-purity quartz is heated to around 1100 ° C, it will not burst when placed in room temperature water.
(II) Impurity control
In the process of producing quartz sand, the raw material of quartz boat, flotation, pickling, chlorination, magnetic separation and other processes are used to control the impurity content. This not only improves the high temperature resistance of the quartz boat, but also reduces the defects caused by impurities, such as bubbles and microparticles, thereby ensuring the performance and quality of the quartz boat.
Product advantage
(I) High temperature stability
Quartz boats can remain stable in high temperature environments for a long time without deformation or damage, and are suitable for a variety of high temperature processes, such as oxidation, diffusion, annealing, etc. This stability is essential to ensure the accuracy and repeatability of semiconductor manufacturing processes.
(II) Chemical inertness
The chemical inertness of the quartz boat prevents it from reacting with reactive gases or chemicals during high-temperature chemical treatment, thus avoiding contamination of the wafer. This property is essential to ensure the high quality and purity of semiconductor devices.
(III) Transparency and optical properties
The transparency of the quartz boat allows it to meet the needs of lighting or exposing the wafer in certain processes. For example, in lithography and exposure processes, the transparency of the quartz boat ensures that the light source accurately shines on the wafer, thus improving the accuracy and efficiency of the process.
(Iv) Thermal stability
The thermal stability of quartz boats allows them to withstand rapid temperature changes without cracking or deformation. This property is important for improving the efficiency and reliability of semiconductor manufacturing processes.
Application scenario
Custom heat-resistant transparent semiconductor quartz boats are widely used in multiple process steps in semiconductor manufacturing, including but not limited to:
1. Oxidation process: The wafer is oxidized at high temperature to form an oxide layer.
2. Diffusion process: Diffusing impurity atoms into a wafer to modify its electrical properties.
3. CVD deposition: Thin films are deposited on the surface of a wafer for the fabrication of semiconductor devices.
4. Annealing process: by heating the material to restore or change its properties, in order to improve the performance of the wafer.
Customized service
We provide customized quartz boat solutions to meet the specific needs of different customers. Customized services include but are not limited to:
1. Size and shape: Customize the size and shape of the quartz boat according to the customer's process requirements.
2. Purity and impurity control: According to different process requirements, different purity grades of quartz boats are provided.
3. Special function design: for example, adding ventilation holes to optimize hot air flow and improve process efficiency.
Heat-resistant transparent semiconductor quartz boats are an indispensable tool in semiconductor manufacturing due to their excellent high temperature resistance, chemical stability and transparency. Our customized services and high-quality products can meet the specific needs of different customers and help the semiconductor industry continue to grow.
Luverre Quartz manufactures and sells a wide range of high quality quartz glass, including quartz tubes, quartz plates, quartz rods, quartz windows, quartz crucibles, quartz boats, quartz flanges, quartz beakers, quartz glass instruments, and more. We can meet all kinds of customized requirements for quartz glass products.
