Fused silica glass plate is famous for its extremely low coefficient of thermal expansion, about 5.5 × 10 ⁻⁷/℃, almost 1/20 of ordinary glass. This characteristic enables it to maintain micrometer level dimensional stability even under severe temperature changes, making it an indispensable core material for precision applications such as semiconductor lithography machines, high-temperature observation windows, and astronomical telescope substrates.

What is your biggest concern about the coefficient of thermal expansion?

Q: My device needs to cycle repeatedly between high temperature and room temperature, and the deformation of ordinary materials causes optical path deviation. How can I solve this problem?

Answer: The ultra-low thermal expansion coefficient of fused silica glass plate can ensure that there is almost no deformation under temperature shock, fundamentally solve the problem of system calibration failure caused by thermal expansion and cold contraction, and ensure the long-term stable operation of your equipment.

Q: We need to use quartz plates as observation windows for high-temperature reaction vessels, which should be both heat-resistant and sealable. Can we achieve this?

Answer: Absolutely possible. Our fused silica plate can not only withstand the temperature up to 1100 ℃, but also provide precise plane grinding to ensure the surface flatness up to λ/10. It can achieve reliable sealing in vacuum or high-pressure environment with special sealing rings.

Q: The project requires a quartz substrate with ultra large size and uniform thickness for thin film deposition carrier. Can customization be supported?

Answer: Of course. We have the ability to produce super large fused silica plates (the maximum size can reach 1000mm x 800mm), and strictly control the thickness tolerance within ± 0.02mm to meet your strict requirements for bearing flatness.

Unique value brought by extremely low coefficient of expansion

1. Almost zero thermal deformation

The linear thermal expansion coefficient of fused silica glass is extremely low, which means that when the temperature changes, its atomic structure almost does not shift. The direct advantage brought by this feature is:

-Precision alignment: In equipment such as lithography machines, prolonged exposure will not cause pattern distortion due to thermal accumulation.

-Thermal stability: As an ideal material for reference rulers and measuring instruments, it ensures the eternity of measurement accuracy.

2. Excellent thermal shock resistance

Due to the low coefficient of thermal expansion, when the material is heated locally, the thermal stress generated inside is very small, so the fused silica plate has extremely strong thermal shock resistance. Even if the red hot quartz plate is directly poured into cold water, it will not explode. This characteristic makes it widely used in:

-Laser protective lenses: withstand instantaneous high-energy laser impact.

-Metallurgical observation window: facing the high-temperature radiation of the furnace without breaking.

3. Comprehensive specification customization capability

We understand that different applications have vastly different requirements for size, thickness, and tolerances. We provide customized services for the entire process from rough cutting, grinding, polishing to chamfering and drilling, ensuring that every quartz plate is perfectly adapted to your equipment interface.

How does the coefficient of thermal expansion affect practical applications?

The physical significance of thermal expansion coefficient

The coefficient of thermal expansion reflects the dimensional stability of a material as it changes with temperature. For precision optics and semiconductor manufacturing, nanoscale deformation means a decrease in product yield. Our fused silica plate eliminates internal stress by selecting raw materials with low hydroxyl (OH) content and special annealing process, so that its thermal expansion curve remains flat and straight in the full temperature range.

Typical application scenarios

1. Semiconductor manufacturing equipment: As a polishing plate for CMP (chemical mechanical polishing) equipment and a substrate for lithography machines, it requires extremely low macroscopic deformation to ensure consistency in wafer processing.

2. Aerospace and Astronomy: As the mirror substrate of large astronomical telescopes, it can maintain the mirror surface shape unchanged even if there is a huge temperature difference between day and night, ensuring clear imaging.

3. New energy and chemical industry: As a hot pressing mold for fuel cells and a mirror for high-temperature reactors, it is necessary to maintain dimensional stability and transparency under high temperature and pressure.

Customer application case: Assisting in the localization and substitution of semiconductor equipment

Case background:

A semiconductor equipment manufacturer is developing a high-temperature ion implantation machine for third-generation semiconductors (silicon carbide SiC). The equipment needs to optically align the wafer through a quartz window in a high-temperature environment above 600 ℃. The original design plan used a certain imported brand of quartz board, but not only did it have a long delivery time, but it also repeatedly encountered the problem of alignment mark drift at high temperatures, resulting in equipment debugging being stalled for three months.

Requirement analysis:

Customers are in urgent need of a fused silica plate with a thickness of 10mm and a size of 300mm × 400mm. Requirements:

-In the thermal cycle from room temperature to 650 ℃, the flatness change is less than 5 microns.

-The material has no bubbles or stripes, ensuring uniform light transmission.

-The four sides need to be finely ground and chamfered at a 45 ° angle for easy installation in the vacuum chamber.

Our solution:

1. Material matching: We recommend using JGS2 grade gas refined quartz with low coefficient of expansion, which has undergone a special heat treatment process to further release residual stress.

2. Precision machining: Using double-sided grinding and polishing technology, the original flatness reaches 1 micron/10mm ⊃2;. Subsequently, multiple high-temperature annealing cycles were conducted to simulate the customer's usage environment, ensuring that the material's "pre shrinkage" was completed, and the actual flatness change on the 650 ℃ high-temperature stage was controlled within 3 microns.

3. Packaging protection: In response to the fragile nature of large-sized thin plates, we have designed specialized shock-absorbing wooden boxes and electrostatic adsorption films to ensure foolproof shipping during sea transportation.

Final effect:

After the customer integrated our quartz plate into the ion implantation machine, the high-temperature alignment system worked stably and the images were clear and distortion free. The customer's process director provided feedback: 'This quartz plate has solved our most troublesome problem of thermal drift, allowing for smooth integration of the entire machine.' 

If you are looking for a fused silica glass plate that can be as stable as a rock in an extreme temperature difference environment, or have any non-standard size and ultra-high precision processing needs, please feel free to contact us for technical advice or sample testing.

Luverre Quartz is a manufacturer focusing on producing various quartz plates, we can produce customized quartz plates in different sizes and shapes, such as square, round, oval and other special shaped designs according to customer's requirements. The processing includes cutting, bending, welding, etc., and there are different colors available, such as transparent quartz plates, opaque quartz plates, milky quartz plates and so on.

Why choose us?

1.We are more experienced.

We have over 19 years production experience of quartz items.

2.We are more efficient.

We reply customers’ requests within 24 hours and we have high efficient production, engineers and sales team.

3.Our quality is more guaranteed.

We control the quality from quartz lumps to quartz sand and then quartz products, we have better and stricter quality control than other manufactures.

4.We are able to produce more difficult quartz products.

We have large grinding platforms and precision etching machines which enable us to manufactures and sells a wide range of high quality quartz glass, including quartz tubes, quartz plates, quartz rods, quartz windows, quartz crucibles, quartz boats, quartz flanges, quartz beakers, quartz glass instruments, and more.

5. About 20 years of professional experience

-Focusing on the manufacturing of quartz products for a quarter century

-The average working experience of the technical team exceeds 15 years

6.Global Service Network

-Our products are exported to over 40 countries and regions including Europe, America, Japan, South Korea, and the Middle East

-Multi language technical support (English, German, French, Spanish, Russian, Japanese)

7. Flexible cooperation mode

Support small batch trial orders, medium - and long-term cooperation, and urgent production for urgent orders, providing OEM/ODM services.