Semiconductor manufacturing is at the core of today's high-tech industry, and quartz glass tubes, as key process materials, their performance directly affects the yield, efficiency and safety of chip production. As a professional quartz products manufacturer, we have been deeply engaged in the foreign trade field for many years, providing high-standard customized quartz solutions for global semiconductor customers.

The core application of quartz glass tubes in semiconductor manufacturing

Quartz glass tubes, with their unique physical and chemical properties, are widely used in the following semiconductor process links:

1. High-temperature diffusion and oxidation process: As a wafer carrier, it conveys doped gases or oxygen in a high-temperature environment.

2. Chemical Vapor Deposition (CVD) : It serves as the liner in the reaction chamber to protect the equipment from corrosive gases.

3. Etching and cleaning process: It is used for conveying high-purity etching agents (such as HF acid) and ultrapure water.

4. Photolithography machine light source system: As the lens and window material for deep ultraviolet (DUV) light sources.

Five major performance requirements for semiconductor-grade quartz glass tubes

1. Ultimate purity and low crystallization

The content of metal impurities should be less than 1ppm, and the crystallization rate at high temperatures (≥1100℃) should approach 0.

- Problem-solving: Prevent impurities from contaminating the wafer or causing the tube to crack due to crystallization to ensure process stability.

Our advantages: By using arc melting technology and high-purity natural crystal raw materials, we ensure that the product purity is over 99.99%, and the crystallization point is as high as 1250℃.

2. High-temperature stability and thermal shock resistance

The softening point should be higher than 1580℃, and the coefficient of thermal expansion should be only 5.5×10⁻⁷/℃.

- Problem-solving: Prevent the pipe body from cracking in sudden cooling and heating environments to extend the service life of the equipment.

Application case: A Southeast Asian chip factory was shut down due to the frequent replacement of its original quartz tubes, which had insufficient thermal shock performance. After switching to our products, the continuous operation cycle of the production line has increased by three times.

3. Chemical inertness and corrosion resistance

- Requirements: Resistant to strong corrosive gases such as hydrogen fluoride and chlorine, with an erosion rate of less than 0.1mm per year.

- Problem-solving: Reduce particle shedding and metal ion release to ensure the uniformity of the etching process.

Our technology: Through surface hydroxyl removal treatment, the product's lifespan in HF environments is increased by 50%.

4. Optical uniformity and ultraviolet transmittance

- Requirements: The transmittance in the deep ultraviolet band (193nm) should be greater than 90%, and there should be no bubble or stripe defects.

- Problem-solving: Ensure the exposure accuracy of the photolithography machine and avoid graphic distortion.

Customer verification: After European lithography equipment manufacturers adopted our quartz tubes, the precision of wafer line width error control was improved to the nanometer level.

5. Precise dimensions and customization capabilities

- Requirements: Pipe diameter tolerance ±0.1mm, wall thickness uniformity > 95%, support for irregular structure design.

- Problem-solving: Match the interfaces of automated equipment to reduce disturbances in the gas flow field.

Our service: Relying on CNC precision processing and 3D inspection systems, we provide customers with a one-stop solution of "design - production - testing".

Why choose us?

1. We have more experience.

We have over 18 years of experience in manufacturing fused quartz products.

2. We are more efficient.

We respond to customers' requests within 24 hours. We have an efficient production, engineering and sales team.

3. Our quality is more guaranteed.

We control the quality from fused quartz blocks to fused quartz sand and then to fused quartz products. Our quality control is better and stricter than that of other manufacturers.

4. We are capable of manufacturing fused quartz products that are more challenging.

We have large grinding platforms and precision etching machines, which enable us to produce large-sized fused silica plates, tubes and high-sized precision fused silica products.

Real customer cases (anonymized processing)

- Customer Background: A semiconductor foundry, 8-inch wafer production line.

Pain point: During the oxidation process, quartz tubes frequently undergo crystallization, resulting in the need to shut down the machine for replacement every 200 hours.

Solution: Customize low-hydroxyl quartz tubes (OH content < 5ppm) and optimize the annealing process curve.

- Achievements: The product lifespan has been extended to 800 hours, and the annual maintenance cost has been reduced by 300,000 US dollars.

Although quartz glass tubes are small components, they are the "lifeline" of semiconductor manufacturing. By precisely meeting the requirements of purity, thermology, chemistry and optics, we help our customers break through process bottlenecks and achieve cost reduction and efficiency improvement.

What problems or challenges have you encountered during the use of your product? Welcome to leave a message and communicate with us!

Luverre Quartz can manufacture customized quartz tubes in various shapes, such as spiral, square, round, with processing including cutting, bending, welding, etc., and available in different colors, such as transparent quartz tubes, opaque quartz tubes, milky white quartz tubes, red quartz tubes, and so on.