T: +86-518-85528012
E: nick@luverrequartz.com
E: nick@luverrequartz.com
1st floor Runlian industrial center No. 116 QuFeng Rd., Haizhou Economic and technological development zone Lianyungang City, Jiangsu Province, China 222062
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1200 degree semiconductor ozone-free quartz boat of various sizes
Semiconductor ozone free quartz boat is a high-temperature carrier tool used in the semiconductor manufacturing process, mainly for carrying silicon wafers or other semiconductor materials in high-temperature diffusion, oxidation, annealing and other processes.
LUVERRE quartz
99.99%
Inner with Vacuum PVC bag and then wrapped with air bubble film, outer with wooden box.
as per customer's requirement
Semiconductor ozone free quartz boat is a high-temperature carrier tool used in the semiconductor manufacturing process, mainly for carrying silicon wafers or other semiconductor materials in high-temperature diffusion, oxidation, annealing and other processes. This product can work stably in a high temperature environment of 1200 ℃ without generating ozone, thus avoiding pollution to semiconductor materials.
Product Features
1. High temperature resistance performance
-The quartz boat is made of high-purity quartz glass material, which can work stably for a long time at a high temperature of 1200 ℃ without deformation or melting.
-Having a low coefficient of thermal expansion (5.5 × 10 ⁻⁷/℃), it can maintain stability in size and shape even under rapid temperature changes.
2. Chemical stability
-Quartz material has extremely high inertness towards most chemical substances, except for hydrofluoric acid and hot phosphoric acid above 300 ℃, it hardly reacts with other chemical substances, effectively preventing the introduction of impurities.
-The impurity content of high-purity quartz glass is extremely low, with metal impurities reaching ppb levels, ensuring the purity of semiconductor materials.
3. Optical performance
-Quartz glass has good transparency in the entire spectral range from ultraviolet to infrared, with a visible light transmittance of over 93% and a transmittance of over 80% in the ultraviolet spectral region.
4. Electrical insulation performance
-The resistance value of quartz glass is equivalent to ten thousand times that of ordinary glass, and it has good electrical insulation performance even at high temperatures.
Customized services
1. Size customization
-We can customize quartz boats of different sizes according to the customer's process requirements. The common size range includes lengths from 100mm to 1000mm, widths from 50mm to 500mm, and heights from 20mm to 200mm.
-Customers can choose the appropriate size based on the specifications and process requirements of semiconductor equipment to ensure a perfect fit between the quartz boat and the equipment.
2. Shape customization
-In addition to the standard boat design, special shaped quartz boats can also be customized according to customer needs, such as semi-circular, flat plate, multi groove, etc.
3. Customized surface treatment
-According to customer requirements, the surface of the quartz boat can be polished, frosted, and other treatments to meet different process requirements.
Application area
1. Semiconductor manufacturing
-In the semiconductor chip manufacturing process, quartz boats are used for high-temperature diffusion, oxidation, annealing and other processes to carry silicon wafers and ensure their uniform heating in high-temperature environments.
2. Photovoltaic industry
-In the production of photovoltaic cells, quartz boats serve as carriers for transporting silicon wafers and are used for diffusion processes of phosphorus or boron to form PN junctions.
3. Optoelectronics field
-Used for the manufacturing of optoelectronic devices, such as LEDs, lasers, etc., to ensure the purity of materials and the stability of processes during high-temperature processing.
Semiconductor ozone free quartz boats have become essential consumables in the semiconductor manufacturing field due to their excellent high-temperature resistance, chemical stability, and optical performance. We are committed to providing customers with high-quality products and customized services to support the development of the semiconductor industry.
Luverre Quartz manufactures and sells a wide range of high quality quartz glass, including quartz tubes, quartz plates, quartz rods, quartz windows, quartz crucibles, quartz boats, quartz flanges, quartz beakers, quartz glass instruments, and more. We can meet all kinds of customized requirements for quartz glass products.
Semiconductor ozone free quartz boat is a high-temperature carrier tool used in the semiconductor manufacturing process, mainly for carrying silicon wafers or other semiconductor materials in high-temperature diffusion, oxidation, annealing and other processes. This product can work stably in a high temperature environment of 1200 ℃ without generating ozone, thus avoiding pollution to semiconductor materials.
Product Features
1. High temperature resistance performance
-The quartz boat is made of high-purity quartz glass material, which can work stably for a long time at a high temperature of 1200 ℃ without deformation or melting.
-Having a low coefficient of thermal expansion (5.5 × 10 ⁻⁷/℃), it can maintain stability in size and shape even under rapid temperature changes.
2. Chemical stability
-Quartz material has extremely high inertness towards most chemical substances, except for hydrofluoric acid and hot phosphoric acid above 300 ℃, it hardly reacts with other chemical substances, effectively preventing the introduction of impurities.
-The impurity content of high-purity quartz glass is extremely low, with metal impurities reaching ppb levels, ensuring the purity of semiconductor materials.
3. Optical performance
-Quartz glass has good transparency in the entire spectral range from ultraviolet to infrared, with a visible light transmittance of over 93% and a transmittance of over 80% in the ultraviolet spectral region.
4. Electrical insulation performance
-The resistance value of quartz glass is equivalent to ten thousand times that of ordinary glass, and it has good electrical insulation performance even at high temperatures.
Customized services
1. Size customization
-We can customize quartz boats of different sizes according to the customer's process requirements. The common size range includes lengths from 100mm to 1000mm, widths from 50mm to 500mm, and heights from 20mm to 200mm.
-Customers can choose the appropriate size based on the specifications and process requirements of semiconductor equipment to ensure a perfect fit between the quartz boat and the equipment.
2. Shape customization
-In addition to the standard boat design, special shaped quartz boats can also be customized according to customer needs, such as semi-circular, flat plate, multi groove, etc.
3. Customized surface treatment
-According to customer requirements, the surface of the quartz boat can be polished, frosted, and other treatments to meet different process requirements.
Application area
1. Semiconductor manufacturing
-In the semiconductor chip manufacturing process, quartz boats are used for high-temperature diffusion, oxidation, annealing and other processes to carry silicon wafers and ensure their uniform heating in high-temperature environments.
2. Photovoltaic industry
-In the production of photovoltaic cells, quartz boats serve as carriers for transporting silicon wafers and are used for diffusion processes of phosphorus or boron to form PN junctions.
3. Optoelectronics field
-Used for the manufacturing of optoelectronic devices, such as LEDs, lasers, etc., to ensure the purity of materials and the stability of processes during high-temperature processing.
Semiconductor ozone free quartz boats have become essential consumables in the semiconductor manufacturing field due to their excellent high-temperature resistance, chemical stability, and optical performance. We are committed to providing customers with high-quality products and customized services to support the development of the semiconductor industry.
Luverre Quartz manufactures and sells a wide range of high quality quartz glass, including quartz tubes, quartz plates, quartz rods, quartz windows, quartz crucibles, quartz boats, quartz flanges, quartz beakers, quartz glass instruments, and more. We can meet all kinds of customized requirements for quartz glass products.
