Fan shaped quartz plate window is an optical grade quartz component with a fan-shaped shape, commonly used in semiconductor equipment observation windows, laser output windows, vacuum chamber sealing interfaces, and high-temperature furnace lateral monitoring ports. Compared to conventional rectangular or circular windows, the fan-shaped design can achieve the maximum effective aperture in a limited space, while also adapting to curved mounting surfaces. As a professional custom manufacturer, Luverre Quartz provides full process processing services from rough cutting, precision grinding, polishing to coating, supporting personalized customization of any center angle (30 ° -180 °), inner and outer radius, and thickness, meeting the stringent requirements of high-end manufacturing fields for irregular quartz window openings.

What core problems can it solve for you?

-Limited installation space: The fan-shaped contour can be embedded into circular flanges or pipe walls without the need to modify the equipment casing.  

-Optical path direction deviation: Customized through fan-shaped angles, precise control of beam incidence and exit angles.  

-High temperature vacuum sealing: Low expansion coefficient ensures no explosion or leakage in vacuum or high temperature environments.  

-Optical performance consistency: From the center of the fan-shaped circle to the outer arc, the material is uniform without stripes, and the imaging is distortion free.

Typical application scenarios

Semiconductor etching equipment: lateral optical endpoint detection window for reaction chamber - attached to the inner wall of the arc-shaped chamber, saving space

Lidar: Circular light output window of rotating scanning module - large angle fan-shaped coverage of horizontal scanning range

Vacuum coating machine: fan-shaped window for observing the deposition process - resistant to high temperature baking and film adhesion

Medical imaging equipment: Circular CT detector window - low scattering, high transmittance, reducing artifacts

High temperature furnace: lateral temperature measurement or image acquisition window - resistant to 1200 ℃ thermal shock, no condensation

Customer Application Case (Anonymous)

Case 1: A semiconductor equipment company (etching machine optical endpoint detection module)

-Requirement: Install a fan-shaped quartz window on the curved side wall of the etching reaction chamber, with a central angle of 60 °, an outer arc radius of 80mm, an inner arc radius of 40mm, and a thickness of 8mm. The window should withstand baking at 200 ℃ and high-density plasma environment, and the transmittance in the ultraviolet region (266nm) should be ≥ 80%.  

-Solution: We use JGS1 synthetic quartz, which is subjected to CNC rough grinding and ring polishing to achieve a surface roughness of Ra0.3nm. The measured UV transmittance at 266nm is 83%. Make a 0.2mm × 45 ° chamfer on the edge of the window to avoid stress concentration.  

-Result: After installation by the customer, the endpoint detection signal strength increased by 35%, and the false triggering rate decreased to one-third of the original.

Case 2: A laser radar startup company (rotating scanning circular window)

-Requirement: A 360 ° circular light output structure for a 128 line mechanical LiDAR requires four fan-shaped quartz plates with central angles of 90 ° each to be assembled into a complete circular ring. Require the concentricity of the inner and outer arcs of each fan-shaped plate to be ≤ 0.02mm, and the transmittance to be ≥ 98% at 905nm.  

-Solution: We have customized fan-shaped plates with an outer arc radius of 65mm, an inner arc radius of 55mm, and a thickness of 2mm. Each plate is labeled with an independent number to ensure a splicing gap of ≤ 0.05mm. They are also coated with a 905nm narrowband anti reflective film.  

-Result: The transmittance of the spliced circular window was measured to be 98.2%, and the uniformity of the scanned point cloud was significantly improved.

Case 3: A German vacuum coating equipment manufacturer (anonymous)

-Requirement: Design a fan-shaped observation window with a central angle of 45 ° for an online optical monitoring system, installed on the curved flange of a cylindrical coating chamber. It needs to withstand baking at 150 ℃ and resist splashing and adhesion of aluminum film material.  

-Solution: We provide a 5mm thick fan-shaped JGS2 quartz window, with a waterproof, oil resistant, and hydrophobic film coated on the outer surface and no coating on the inner surface to ensure light path transmission. The edge adopts a stepped structure (3mm thick step+2mm thick transparent area) with O-ring sealing.  

-Result: The hydrophobic membrane effectively reduces the adhesion period of the membrane material, and the cleaning frequency has been extended from once per batch to once every 10 batches.

Whether you need small batches of scientific research grade samples or large quantities of industrial grade components, we can provide one-stop services from drawing review, material selection, processing and polishing to coating testing. Please send us your fan angle, radius, thickness, and usage environment parameters, and we will provide you with technical solutions and quotations within 24 hours. Make the precise fan-shaped window the ideal channel for your optical system.

Luverre Quartz manufactures and sells a wide range of high quality quartz glass, including quartz tubes, quartz plates, quartz rods, quartz windows, quartz crucibles, quartz boats, quartz flanges, quartz beakers, quartz glass instruments, and more. We can meet all kinds of customized requirements for quartz glass products.