T: +86-518-85528012
E: nick@luverrequartz.com
E: nick@luverrequartz.com
1st floor Runlian industrial center No. 116 QuFeng Rd., Haizhou Economic and technological development zone Lianyungang City, Jiangsu Province, China 222062
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Semiconductor grade high-purity bubble free quartz tube
Semiconductor grade high-purity bubble free quartz tubes are high-end quartz glass tubes manufactured using advanced synthesis or electric melting processes
LUVERRE quartz
99.99%
Inner with Vacuum PVC bag and then wrapped with air bubble film, outer with wooden box.
as per customer's requirement
Semiconductor grade high-purity bubble free quartz tube
Today, as semiconductor manufacturing processes move towards processes below 3 nanometers, any micrometer level impurities or bubbles can cause chip circuit short circuits or yield drops. Semiconductor grade high-purity bubble free quartz tubes are high-end quartz glass tubes manufactured using advanced synthesis or electric melting processes, with strict control over raw material purification and molding environments. Its core feature is that the metal impurity content is below 50ppb (even reaching ppb level), and there are no visible or microscopic bubbles in the tube wall, providing an extremely clean carrying and reaction environment for high-temperature diffusion/oxidation furnaces and CVD vapor deposition equipment. It is a key consumable to ensure the yield of 12 inch wafer manufacturing.
Frequently Asked Questions from Customers
Q: Why does my wafer always experience electrical performance failure due to metal contamination during high-temperature diffusion?
Answer: This is usually due to impurities that precipitate from ordinary quartz tubes at high temperatures. Our high-purity quartz tube maintains structural stability at a high temperature of 1200 ℃ by controlling the total amount of 19 metal elements such as Al, Fe, Na at an extremely low level, without releasing impurity particles into the furnace tube, thus protecting the cleanliness of the wafer from the source.
Q: Do tiny bubbles on the inner wall of quartz tubes really affect semiconductor production?
Answer: Yes. Bubbles will expand, rupture, and release fine dust during high-temperature processes, which is one of the main causes of product defects. We adopt zero bubble control technology to ensure uniform and dense microstructure of the tube wall, effectively eliminating the risk of particle contamination caused by bubble rupture.
Q: Can I customize a special specification with an outer diameter of over 300mm and an indefinite length?
Answer: Absolutely possible. As a customized manufacturer, we are not limited to standard products. We provide customized services for various specifications ranging from an outer diameter of 20mm to over 350mm and a wall thickness of 1.5mm to 15mm, and can perform deep processing such as cutting, expanding, sanding, or flange welding according to the drawings.
Core advantages and applications of the product
Core problem solved
1. Metal impurity pollution: Solved the problem of threshold voltage drift in wafers caused by the precipitation of alkali metals and heavy metals such as Na, K, Li in high-temperature processes due to insufficient purity of ordinary quartz tubes.
2. Particle defects caused by bubbles: Solved the problem of coating detachment or particle generation due to bubble rupture on the tube wall, which affects the uniformity of lithography or etching.
3. Excessive hydroxyl (OH) content: Reduced the hydroxyl content, solving the problems of infrared heating efficiency affected by hydroxyl absorption peaks and poor high-temperature deformation resistance of quartz tubes.
4. Geometric accuracy deviation: Strict control of concentricity and ellipticity ensures the uniformity of airflow inside the furnace tube, avoiding local overheating and explosion caused by uneven wall thickness.
Product application areas
-Semiconductor pre-processing: Used for diffusion furnace inner/outer tubes, boat racks, cleaning tanks, CVD reaction chambers for 12 inch/8-inch wafers.
-Photovoltaic solar energy: used for carrier tubes and process tubes in large-scale PECVD deposition processes.
-Special optical fibers and optics: as protective sleeves for the preparation and annealing of optical fiber preforms.
Customer Application Cases
To demonstrate the actual performance of our product, we would like to share a typical semiconductor industry application case as follows:
Case background:
A well-known domestic manufacturer of 8-inch power semiconductor chips is facing a severe yield bottleneck in the fierce market competition. In their core high-temperature gate oxidation process, they found that randomly distributed "pinhole" defects and unpredictable metal contamination often appeared on the wafer surface, resulting in large leakage current in the final product, and the yield of high-end power devices remained low, unable to meet the standards for large-scale production.
Customer requirements:
The customer urgently needs a micro pollution source that can completely eliminate the quality problems caused by the furnace tube itself, and also requires quartz tubes to have excellent thermal stability to adapt to the production rhythm of frequent temperature rise and fall, avoiding deformation or cracking of the tube fittings.
Our solution:
We have customized a batch of semiconductor grade high-purity bubble free quartz tubes (outer diameter of φ 220mm, wall thickness of 5mm, length of 2500mm) specifically for our customers' horizontal furnaces. The characteristics of this batch of products are as follows:
1. Ultimate purity: We strictly control the content of metal impurities (such as Fe, Cu, Ni, and other long-lived killers) below 0.01ppm, effectively blocking the deep pollution of heavy metals on silicon wafers.
2. Bubble free structure: Using high-purity synthesis technology, it ensures that there are no bubbles on the tube wall under strong light flashlights and high-power microscopes, eliminating the risk of pinhole defects caused by "silicon dust" generated by bubble rupture.
3. High precision geometric dimensions: Strictly control the curvature of the bow to be less than 1.0mm/m to ensure temperature uniformity at the position of the crystal circle in the long tube.
Final effect:
After a quarter of actual production verification, the customer feedback:
-Yield improvement: The defect density of key oxide layers has been reduced by over 30%, and the overall yield of high-end power devices has increased by 5-8 percentage points.
-Extended lifespan: Due to the excellent thermal stability of the material, the furnace tube did not show significant sagging or loss of permeability during high-temperature processes, and the service life was extended by about 20% compared to previous supplier products.
-Maintenance cycle: Due to the reduction of particle pollution, the cleaning and maintenance cycle of furnace tubes has been extended, indirectly improving equipment utilization.
We are well aware that every semiconductor process and research project has different requirements for quartz materials. If you are looking for an absolutely reliable, customizable quartz tube solution that can meet advanced process challenges, we are always ready to provide support for you.
Welcome to contact us for a quotation or provide drawings, so that we can match you with the most suitable customized solution for semiconductor grade high-purity quartz tubes!
Luverre Quartz is a manufacturer specializing in quartz tubes and other quartz items.We have over 18 years experience with the production of quartz tubes, we will be your reliable partner on quartz tubes and other quartz items.
Luverre Quartz can manufacture customized quartz tubes in various shapes, such as spiral, square, round, with processing including cutting, bending, welding, etc., and available in different colors, such as transparent quartz tubes, opaque quartz tubes, milky white quartz tubes, red quartz tubes, and so on.
Why choose us?
1.We are more experienced.
We have over 19 years production experience of quartz items.
2.We are more efficient.
We reply customers’ requests within 24 hours and we have high efficient production, engineers and sales team.
3.Our quality is more guaranteed.
We control the quality from quartz lumps to quartz sand and then quartz products, we have better and stricter quality control than other manufactures.
4.We are able to produce more difficult quartz products.
We have large grinding platforms and precision etching machines which enable us to manufactures and sells a wide range of high quality quartz glass, including quartz tubes, quartz plates, quartz rods, quartz windows, quartz crucibles, quartz boats, quartz flanges, quartz beakers, quartz glass instruments, and more.
5. About 20 years of professional experience
-Focusing on the manufacturing of quartz products for a quarter century
-The average working experience of the technical team exceeds 15 years
6.Global Service Network
-Our products are exported to over 40 countries and regions including Europe, America, Japan, South Korea, and the Middle East
-Multi language technical support (English, German, French, Spanish, Russian, Japanese)
7. Flexible cooperation mode
Support small batch trial orders, medium - and long-term cooperation, and urgent production for urgent orders, providing OEM/ODM services.
Semiconductor grade high-purity bubble free quartz tube
Today, as semiconductor manufacturing processes move towards processes below 3 nanometers, any micrometer level impurities or bubbles can cause chip circuit short circuits or yield drops. Semiconductor grade high-purity bubble free quartz tubes are high-end quartz glass tubes manufactured using advanced synthesis or electric melting processes, with strict control over raw material purification and molding environments. Its core feature is that the metal impurity content is below 50ppb (even reaching ppb level), and there are no visible or microscopic bubbles in the tube wall, providing an extremely clean carrying and reaction environment for high-temperature diffusion/oxidation furnaces and CVD vapor deposition equipment. It is a key consumable to ensure the yield of 12 inch wafer manufacturing.
Frequently Asked Questions from Customers
Q: Why does my wafer always experience electrical performance failure due to metal contamination during high-temperature diffusion?
Answer: This is usually due to impurities that precipitate from ordinary quartz tubes at high temperatures. Our high-purity quartz tube maintains structural stability at a high temperature of 1200 ℃ by controlling the total amount of 19 metal elements such as Al, Fe, Na at an extremely low level, without releasing impurity particles into the furnace tube, thus protecting the cleanliness of the wafer from the source.
Q: Do tiny bubbles on the inner wall of quartz tubes really affect semiconductor production?
Answer: Yes. Bubbles will expand, rupture, and release fine dust during high-temperature processes, which is one of the main causes of product defects. We adopt zero bubble control technology to ensure uniform and dense microstructure of the tube wall, effectively eliminating the risk of particle contamination caused by bubble rupture.
Q: Can I customize a special specification with an outer diameter of over 300mm and an indefinite length?
Answer: Absolutely possible. As a customized manufacturer, we are not limited to standard products. We provide customized services for various specifications ranging from an outer diameter of 20mm to over 350mm and a wall thickness of 1.5mm to 15mm, and can perform deep processing such as cutting, expanding, sanding, or flange welding according to the drawings.
Core advantages and applications of the product
Core problem solved
1. Metal impurity pollution: Solved the problem of threshold voltage drift in wafers caused by the precipitation of alkali metals and heavy metals such as Na, K, Li in high-temperature processes due to insufficient purity of ordinary quartz tubes.
2. Particle defects caused by bubbles: Solved the problem of coating detachment or particle generation due to bubble rupture on the tube wall, which affects the uniformity of lithography or etching.
3. Excessive hydroxyl (OH) content: Reduced the hydroxyl content, solving the problems of infrared heating efficiency affected by hydroxyl absorption peaks and poor high-temperature deformation resistance of quartz tubes.
4. Geometric accuracy deviation: Strict control of concentricity and ellipticity ensures the uniformity of airflow inside the furnace tube, avoiding local overheating and explosion caused by uneven wall thickness.
Product application areas
-Semiconductor pre-processing: Used for diffusion furnace inner/outer tubes, boat racks, cleaning tanks, CVD reaction chambers for 12 inch/8-inch wafers.
-Photovoltaic solar energy: used for carrier tubes and process tubes in large-scale PECVD deposition processes.
-Special optical fibers and optics: as protective sleeves for the preparation and annealing of optical fiber preforms.
Customer Application Cases
To demonstrate the actual performance of our product, we would like to share a typical semiconductor industry application case as follows:
Case background:
A well-known domestic manufacturer of 8-inch power semiconductor chips is facing a severe yield bottleneck in the fierce market competition. In their core high-temperature gate oxidation process, they found that randomly distributed "pinhole" defects and unpredictable metal contamination often appeared on the wafer surface, resulting in large leakage current in the final product, and the yield of high-end power devices remained low, unable to meet the standards for large-scale production.
Customer requirements:
The customer urgently needs a micro pollution source that can completely eliminate the quality problems caused by the furnace tube itself, and also requires quartz tubes to have excellent thermal stability to adapt to the production rhythm of frequent temperature rise and fall, avoiding deformation or cracking of the tube fittings.
Our solution:
We have customized a batch of semiconductor grade high-purity bubble free quartz tubes (outer diameter of φ 220mm, wall thickness of 5mm, length of 2500mm) specifically for our customers' horizontal furnaces. The characteristics of this batch of products are as follows:
1. Ultimate purity: We strictly control the content of metal impurities (such as Fe, Cu, Ni, and other long-lived killers) below 0.01ppm, effectively blocking the deep pollution of heavy metals on silicon wafers.
2. Bubble free structure: Using high-purity synthesis technology, it ensures that there are no bubbles on the tube wall under strong light flashlights and high-power microscopes, eliminating the risk of pinhole defects caused by "silicon dust" generated by bubble rupture.
3. High precision geometric dimensions: Strictly control the curvature of the bow to be less than 1.0mm/m to ensure temperature uniformity at the position of the crystal circle in the long tube.
Final effect:
After a quarter of actual production verification, the customer feedback:
-Yield improvement: The defect density of key oxide layers has been reduced by over 30%, and the overall yield of high-end power devices has increased by 5-8 percentage points.
-Extended lifespan: Due to the excellent thermal stability of the material, the furnace tube did not show significant sagging or loss of permeability during high-temperature processes, and the service life was extended by about 20% compared to previous supplier products.
-Maintenance cycle: Due to the reduction of particle pollution, the cleaning and maintenance cycle of furnace tubes has been extended, indirectly improving equipment utilization.
We are well aware that every semiconductor process and research project has different requirements for quartz materials. If you are looking for an absolutely reliable, customizable quartz tube solution that can meet advanced process challenges, we are always ready to provide support for you.
Welcome to contact us for a quotation or provide drawings, so that we can match you with the most suitable customized solution for semiconductor grade high-purity quartz tubes!
Luverre Quartz is a manufacturer specializing in quartz tubes and other quartz items.We have over 18 years experience with the production of quartz tubes, we will be your reliable partner on quartz tubes and other quartz items.
Luverre Quartz can manufacture customized quartz tubes in various shapes, such as spiral, square, round, with processing including cutting, bending, welding, etc., and available in different colors, such as transparent quartz tubes, opaque quartz tubes, milky white quartz tubes, red quartz tubes, and so on.
Why choose us?
1.We are more experienced.
We have over 19 years production experience of quartz items.
2.We are more efficient.
We reply customers’ requests within 24 hours and we have high efficient production, engineers and sales team.
3.Our quality is more guaranteed.
We control the quality from quartz lumps to quartz sand and then quartz products, we have better and stricter quality control than other manufactures.
4.We are able to produce more difficult quartz products.
We have large grinding platforms and precision etching machines which enable us to manufactures and sells a wide range of high quality quartz glass, including quartz tubes, quartz plates, quartz rods, quartz windows, quartz crucibles, quartz boats, quartz flanges, quartz beakers, quartz glass instruments, and more.
5. About 20 years of professional experience
-Focusing on the manufacturing of quartz products for a quarter century
-The average working experience of the technical team exceeds 15 years
6.Global Service Network
-Our products are exported to over 40 countries and regions including Europe, America, Japan, South Korea, and the Middle East
-Multi language technical support (English, German, French, Spanish, Russian, Japanese)
7. Flexible cooperation mode
Support small batch trial orders, medium - and long-term cooperation, and urgent production for urgent orders, providing OEM/ODM services.
