The high-temperature resistant, corrosion-resistant, and ozone free quartz boat is a core semiconductor and photovoltaic carrier tool made of high-purity (99%) quartz glass, processed with precision and special techniques. It not only has excellent high temperature resistance (up to 1100 ℃ in the long term and 1450 ℃ in the short term) and acid alkali corrosion resistance, but also effectively inhibits the generation of ozone by photochemical reactions through special UV filtering treatment. As an ideal carrier for wafers and silicon wafers in high-temperature diffusion, oxidation, and annealing processes, it perfectly balances extremely high chemical purity, structural stability, and environmental safety.

FAQ

Q1: What is an "ozone free" quartz boat? What is the difference between it and a regular quartz boat?

A: Ordinary transparent quartz glass has a very high transmittance of ultraviolet light below 260nm, making it easy to catalyze oxygen in the air to produce ozone under strong ultraviolet light sources (such as certain curing and detection equipment). Ozone free quartz boats effectively block the transmission of short wave ultraviolet light through special material doping or coating processes, thereby suppressing the generation of ozone, making them particularly suitable for precision workshops with strict requirements for cleanliness in production environments.

Q2: Will quartz boats deform after long-term operation at high temperatures of 1200 ℃?

A: I won't. Our quartz boat is made of high-quality high-purity quartz raw materials, with a softening point of up to 1730 ℃ and a long-term working temperature of up to 1100 ℃. It can even withstand 1450 ℃ in a short period of time. The thermal expansion coefficient of quartz glass is extremely low (5.5 × 10 ⁻⁷/℃), and it can maintain excellent dimensional stability and structural strength even under drastic temperature changes, making it less prone to bending or explosion.

Q3: What specifications and sizes do you support for customization? What is the minimum tolerance for slot spacing that can be controlled?

A: We provide comprehensive customization services, supporting customization according to customers' furnace tube size, wafer size (such as 6 inches, 8 inches, 12 inches, etc.). We can process vertical boats, horizontal boats, and irregular boats. Through high-precision CNC machining and flame polishing processes, we can stably control the groove spacing tolerance of the quartz boat within ± 0.01mm, ensuring precise and parallel wafer loading.

Requirements and Problem Solving

For users in the semiconductor, photovoltaic, and high-end chemical industries, if the purity of the carrier in high-temperature processes is not sufficient, it will directly contaminate the wafer and lead to a decrease in yield; If the heat resistance and corrosion resistance are insufficient, it will lead to frequent deformation and cracking of the boat body, increasing the cost of production shutdown and replacement. Our high-temperature, corrosion-resistant, and ozone free quartz boat perfectly solves the core problems of traditional vehicles being prone to pollution, deformation, and harmful ozone generation in high temperature, strong acid-base, and strong UV environments, providing ultimate cleanliness, stability, and safety guarantees for your high-temperature processes.

Core advantages and application value

Ultimate high temperature resistance and thermal stability

Ultra high temperature resistance: The softening point is about 1730 ℃, and it can work continuously for a long time in an environment of 1100 ℃. The short-term ultimate temperature resistance can reach 1450 ℃, perfectly adapting to the high temperature environment of various diffusion furnaces and oxidation furnaces.

Strong thermal shock resistance: Its extremely low coefficient of thermal expansion allows it to withstand severe rapid cooling and heating changes (such as being directly immersed in room temperature water from 1100 ℃) without bursting, greatly extending its service life.

Excellent corrosion resistance and high purity

Chemical inertness: Except for hydrofluoric acid and hot phosphoric acid above 300 ℃, it has extremely strong resistance to most strong acids (such as hydrochloric acid, nitric acid, sulfuric acid, aqua regia), strong bases, and halogen gases. Its acid resistance is 30 times that of ceramics and 150 times that of stainless steel.

Ultra low pollution: Using quartz raw materials with a purity of over 99.99%, the metal impurity content is extremely low, and impurities will not precipitate and contaminate the wafer or reactants during high-temperature processes, ensuring high product yield.

Environmentally friendly, ozone free, and excellent optical/electrical performance

Inhibition of ozone: The special ozone free formula effectively filters out short wave ultraviolet rays, avoiding the generation of ozone during photolithography, detection, or UV curing processes, protecting the health of workshop personnel and precision equipment.

Insulation and transparency: With extremely high resistance value (ten thousand times that of ordinary glass), it is an excellent high-temperature electrical insulation material; At the same time, it has extremely high transmittance in both visible and infrared wavelengths, making it easy to visually observe during the production process.

Flexible customized processing services

Diverse forms: We can provide various forms such as diffusion boats, oxidation boats, LPCVD boats, and cleaning flower baskets, supporting vertical, horizontal, and multi-layer structural designs.

Precision machining: supports deep processing such as slotting, punching, chamfering, welding, flame polishing, etc. We can provide precise size matching for both single piece load-bearing and mass-produced boats.

Customer application case sharing

Case 1: Diffusion process upgrade of a well-known photovoltaic cell manufacturer

Customer problem: In the phosphorus diffusion process of photovoltaic cells, the ordinary quartz boat originally used by the customer is prone to crystallization and microcracks on the surface in an acidic gas environment above 1000 ℃ for a long time, causing the silicon wafer to get stuck and fragmented when entering and leaving the furnace tube. Moreover, the lifespan of the boat is less than half a year, which seriously affects the continuous operation rate of the production line.

Solution: We have customized a batch of high-purity, corrosion-resistant ozone free quartz boats for it. An optimized reinforcing rib structure was designed for its furnace tube structure to enhance its load-bearing capacity at high temperatures, and high-precision flame polishing treatment was applied to all grooves in contact with the silicon wafer to ensure a smooth and burr free surface.

Application effect: After replacing the new quartz boat, the fragmentation rate of the customer's production line decreased by more than 30%. In a highly corrosive environment, the quartz boat maintains good structural integrity even after continuous use for more than 10 months, without any crystallization pollution, significantly reducing the cost of consumable replacement and downtime maintenance for customers.

Case 2: Special Oxidation Experiment at a Semiconductor Research Institute

Customer challenge: When conducting oxidation experiments on new semiconductor materials, the research team needs to use a strong ultraviolet light source for auxiliary catalysis. The original transparent quartz boat generates a large amount of ozone under strong ultraviolet light irradiation, which not only corrodes the metal fittings around the furnace tube, but also poses a potential threat to the respiratory system of the experimental personnel.

Solution: We have processed a dedicated ozone free quartz boat for the customer's experimental furnace based on its size. The boat effectively blocks short wave ultraviolet radiation and utilizes the excellent electrical insulation of quartz glass to ensure experimental safety in high-temperature electric field environments.

Application effectiveness: After using an ozone free quartz boat, the ozone concentration in the experimental chamber dropped below the safety standard, completely solving the problems of environmental pollution and equipment corrosion. Its precise slot design (with a tolerance control of ± 0.01mm) also ensures the thermal uniformity of the experimental samples, helping the research team obtain more accurate and reproducible experimental data.

If you have customized needs for high-temperature resistant, corrosion-resistant, and ozone free quartz boats, or are troubled by the lifespan and yield of high-temperature vehicles, please feel free to contact us at any time! Whether it's standard specification procurement or complex customized designs based on drawings, we will wholeheartedly provide you with the most professional quartz product solutions.

Luverre Quartz manufactures and sells a wide range of high quality fused quartz glass, including fused quartz tubes, fused quartz plates, fused quartz rods, fused quartz windows, fused quartz crucibles, fused quartz boats, fused quartz flanges, fused quartz beakers, fused quartz glass instruments, and more. We can meet all kinds of customized requirements for fused quartz glass products.

For more information, please feel free to contact us.