As a material with excellent physical and chemical properties, high-purity quartz tubes play a crucial role in semiconductor manufacturing, especially in plasma-enhanced chemical vapor deposition (PECVD) technology.

Characteristics of high purity quartz tube

The main component of high-purity quartz tubes is silicon dioxide (SiO2), which can be obtained through a special material preparation process.

This material has the following significant properties:

High purity: effectively reduces the impurity content in the semiconductor manufacturing process, improving the performance and stability of the device.

High-temperature stability: can withstand temperatures up to 1200 ° C, and is not prone to deformation or cracking at high temperatures, ensuring the reliability and stability of the manufacturing process.

Corrosion resistance: It has excellent acid and alkali resistance, oxidation resistance, and corrosion resistance, and can work in various harsh environments such as strong acids, strong alkalis, and highly oxidizing gases, effectively protecting semiconductor devices.

Exceptional optical properties: It has good light transmittance and can penetrate most of the ultraviolet, visible, and near-infrared spectra, providing high-quality optical materials for the fabrication of semiconductor devices.

Introduction to PECVD Technology

PECVD (Plasma Enhanced Chemical Vapor Deposition) is a thin film deposition technology commonly used in the semiconductor industry. It combines the basic principles of chemical vapor deposition (CVD) with plasma technology to produce high-quality thin films and precisely control their properties. Compared to traditional CVD technology, PECVD uses plasma to improve deposition efficiency, enabling material deposition at lower temperatures.

In the PECVD process, a low-temperature plasma under low pressure triggers a glow discharge at the cathode of the deposition chamber. The sample is heated to a set temperature by a heating device, and a specific amount of process gas is introduced. These gases undergo various chemical reactions under the action of the plasma, and finally form a solid thin film on the surface of the sample.

Application of high purity quartz tube in PECVD

Reaction chamber wall material:

The high purity quartz tube can be used as the wall material of the reaction chamber in the PECVD process. Due to its excellent corrosion resistance and high temperature stability, it can well resist the erosion of high temperature and corrosive gas, and ensure the purity and accuracy of the reaction chamber.

Electrodes and heaters:

In PECVD systems, high purity quartz tubes can also be used as electrodes and heaters. Its good electrical properties and high temperature stability enable it to work stably in high electric field and high temperature environments, ensuring the smooth progress of the deposition process.

Window material:

High-purity quartz tubes can also be used as window materials in ion implantation processes. In the PECVD process, window materials need to protect the vacuum and corrosion resistance of equipment, and high-purity quartz tubes just meet these requirements.

Improve deposition efficiency and quality:

Due to the excellent light transmittance of high-purity quartz tubes, the uniform distribution and sufficient reaction of the reaction gas in the plasma can be ensured, thereby improving the deposition efficiency. At the same time, the use of high-purity materials also reduces the influence of impurities on the quality of the film, improving the uniformity and performance of the film.

The importance of regularly replacing quartz tubes

During the PECVD process, a layer of SiNx and other substances will precipitate on the outer wall of the quartz tube as the service time increases. This layer of sediment will affect the excitation effect of the quartz tube, which in turn affects the quality and efficiency of the deposited film. Therefore, regular replacement of high-purity quartz tubes is an important measure to ensure the stability of the PECVD process and the quality of the film.

The application of high-purity quartz tube in PECVD technology is of irreplaceable importance. Its excellent physical and chemical properties enable it to work stably in high temperature, high electric field and corrosive environment, ensuring the smooth progress of the deposition process and the high quality of the film.

Luverre Quartz is a manufacturer specializing in quartz tubes and other quartz items.We have over 18 years experience with the production of quartz tubes, we will be your reliable partner on quartz tubes and other quartz items.

Luverre Quartz can manufacture customized quartz tubes in various shapes, such as spiral, square, round, with processing including cutting, bending, welding, etc., and available in different colors, such as transparent quartz tubes, opaque quartz tubes, milky white quartz tubes, red quartz tubes, and so on.