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What Are The Special Advantages of JGS2 Quartz Glass in Semiconductor Experiments

Views: 0     Author: Site Editor     Publish Time: 2025-09-10      Origin: Site

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What Are The Special Advantages of JGS2 Quartz Glass in Semiconductor Experiments

In the precise and demanding field of semiconductor experimentation and manufacturing, the selection of each material is crucial. Among them, JGS2 quartz glass has become an indispensable basic material in many key process links due to its series of irreplaceable excellent characteristics. It is not just a type of glass, but also the technological cornerstone for achieving high-performance chip manufacturing.


What are the special advantages of JGS2 quartz glass in semiconductor experiments


What is JGS2 quartz glass?

JGS2 quartz glass is a synthetic quartz glass made of high-purity silicon dioxide (SiO ₂), which is melted with a hydrogen oxygen flame to produce high-purity crystal powder. JGS "is the code name for the Chinese national standard, where JGS2 refers to ultraviolet optical quartz glass. Its core feature is high transmittance in the ultraviolet band (160nm-300nm), while possessing a series of excellent physical and chemical properties common to quartz glass.

In the context of semiconductors, what we usually refer to as "quartz glass" or "quartz devices" (such as quartz boats, quartz tubes, quartz baffles) mostly refer to JGS2 or higher quality quartz materials.


The problem solved by JGS2 quartz glass


The core advantages and solutions of JGS2 quartz glass

The advantages of JGS2 quartz glass are multifaceted, and together they solve many pain points in semiconductor experiments and production.

1. Extremely high purity and low pollution - solving the problem of "impurity pollution"

Advantage description: JGS2 quartz glass has extremely low metal impurity content (usually less than a few parts per million) and extremely high chemical purity.

Problem solved:

In high-temperature processes such as diffusion and oxidation, ordinary materials will precipitate metal ions (such as Na ⁺, K ⁺, Fe ⊃2; ⁺, etc.) or other impurities, which can contaminate silicon wafers and dramatically reduce the lifetime of minority carriers, leading to deterioration of integrated circuit performance, increased leakage current, and even device failure.

The stable lattice and ultra-high purity of JGS2 quartz glass ensure that it does not introduce measurable impurities into silicon wafers even at high temperatures above 1200 ℃, thereby ensuring the electrical performance and yield of the chip.


The core advantages of JGS2 quartz glass


2. Excellent thermal stability - solving the problems of "thermal stress rupture" and "deformation"

Advantage description: JGS2 quartz glass has an extremely low coefficient of thermal expansion (about 5.5 × 10 ⁻⁷/℃), equivalent to 1/10~1/20 of ordinary glass. This means that it has a strong tolerance for rapid temperature changes.

Problem solved:

Semiconductor processes involve frequent rapid heating and cooling (such as rapid thermal annealing RTP). Ordinary materials may experience internal stress due to uneven thermal expansion and contraction, leading to cracking or breakage.

JGS2 quartz glass has excellent "thermal shock stability" and can withstand drastic temperature changes without cracking, ensuring the continuity and safety of the production process and extending the service life of process components.


Good UV Transmittance of JGS2 Quartz Glass


3. Excellent high temperature resistance - solving the problem of "material softening"

Advantage description: The softening point of JGS2 quartz glass is as high as 1730 ℃, and the long-term use temperature can reach above 1100 ℃.

Problem solved:

Semiconductor diffusion, oxidation and other processes are usually carried out in high-temperature furnace tubes ranging from 1000 ℃ to 1250 ℃. Many metals and ordinary glass will soften, melt, or release gases at this temperature.

JGS2 quartz glass can maintain stable shape and strength for a long time in this high-temperature environment, providing reliable support and reaction environment for silicon wafers. It is an ideal material for manufacturing high-temperature fixtures such as furnace tubes, boats, and blades.


Excellent thermal stability of JGS2 quartz glass


4. Good UV transmittance - solving the problem of "energy transfer in photolithography process"

Advantage description: JGS2 quartz glass has high transmittance in the ultraviolet spectral region, especially in the deep ultraviolet (DUV) band.

Problem solved:

In photolithography, it is necessary to accurately project the patterns on the mask onto the silicon wafer through an exposure system. Modern lithography machines use DUV light sources (such as KrF 248nm, ArF 193nm).

As the main material for lithography machine lenses and mask substrates, JGS2 quartz glass with high ultraviolet transmittance ensures efficient transmission of light source energy, reduces energy loss, and thus ensures the resolution and accuracy of exposure patterns.


Excellent optical uniformity of JGS2 quartz glass


5. Excellent chemical stability - solving the problem of "acid-base corrosion"

Advantage description: Apart from hydrofluoric acid (HF) and hot phosphoric acid, JGS2 quartz glass exhibits excellent corrosion resistance to almost all acids (such as HCl, H ₂ SO ₄, HNO ∝) and bases.

Problem solved:

The wet etching and cleaning process of semiconductors extensively uses various strong acid and alkali solutions. Reaction tanks, flower baskets, pipelines, etc. require long-term exposure to these chemical reagents.

JGS2 quartz glass vessels can effectively resist chemical corrosion, avoiding the introduction of new impurities due to container corrosion, while ensuring the long-term durability of the vessel itself.


Excellent high temperature resistance of JGS2 quartz glass


6. Excellent optical uniformity and electrical insulation

Advantage description: The internal structure is uniform, and the consistency of refractive index is extremely high; It is also an excellent electrical insulator with extremely high electrical resistivity.

Problem solved:

Optical uniformity ensures that no distortion occurs in the optical path, which is crucial for the imaging quality of lithography lenses.

The high electrical insulation makes it suitable for use in processes involving plasma such as CVD, as an observation window and dielectric window for reaction chambers, which can observe internal working conditions and effectively isolate electric fields.


Excellent chemical stability of JGS2 quartz glass


Examples of main application scenarios

Based on the above advantages, JGS2 quartz glass is widely used in the following semiconductor experiments and manufacturing processes:

High temperature process: diffusion furnace tube, oxidation furnace tube, quartz boat, quartz paddle, baffle, etc.

Lithography process: photomask template substrate, optical system components of lithography machine.

Wet process: acid/alkali cleaning tank, flower basket, etching tank.

CVD process: lining tube, bell cover, gas distribution plate inside the reaction chamber.

Observation and measurement: various observation windows, laser windows, UV lampshades.


1-800mm shaped optically transparent quartz plate


JGS2 quartz glass, with its ultra-high purity, excellent thermal stability, outstanding optical properties, and outstanding chemical resistance, perfectly solves the core requirements of low pollution, high temperature resistance, thermal shock resistance, corrosion resistance, and high-precision optical transmission in semiconductor experiments and manufacturing. It is not only a key functional material in semiconductor equipment and processes, but also an important guarantee for promoting the continuous development of advanced processes. Choosing high-quality JGS2 quartz glass products lays a solid foundation for the stability, reliability, and success rate of semiconductor research and production.


Custom Quartz Glass Manufacture


Luverre Quartz manufactures and sells a wide range of high quality quartz glass, including quartz tubes, quartz plates, quartz rods, quartz windows, quartz crucibles, quartz boats, quartz flanges, quartz beakers, quartz glass instruments, and more. We can meet all kinds of customized requirements for quartz glass products.


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