5-80mm JGS1-3 UV square quartz plate is an optical grade quartz glass plate made from high-purity silicon dioxide as the core raw material through advanced processes such as hydrogen oxygen flame melting, vacuum electric melting, or plasma chemical vapor deposition (PCVD). The product covers three major series: JGS1 (far ultraviolet optical quartz glass), JGS2 (ultraviolet optical quartz glass), and JGS3 (infrared optical quartz glass), with a thickness range of 5-80mm, and supports customized irregular structures such as square and rectangular shapes.

Core features:

Ultra wide spectral transmittance

JGS1: The transmittance in the 180-2500nm band is ≥ 90%, and can reach over 90% at 185nm. The hydroxyl absorption peak at 2730nm is significant, making it suitable for fields such as short wave ultraviolet laser and deep ultraviolet lithography.

JGS2: Transmittance in the wavelength range of 200-2500nm ≥ 85%, with a slight absorption peak at 240-250nm, suitable for both UV and visible light applications.

JGS3: The transmittance of the 260-3500nm band is ≥ 85%, almost free of hydroxyl groups (OH), and has excellent infrared transmission performance, suitable for thermal imaging, fiber optic transmission and other scenarios.

Extreme environmental tolerance

Temperature resistance range: -196 ℃ to 1200 ℃ (short-term use can reach 1300 ℃), with a thermal expansion coefficient of only 5.5 × 10 ⁻⁷/℃, capable of withstanding rapid cooling and thermal shock (such as quenching at 1000 ℃ until cold water does not rupture).

Chemical stability: Except for hydrofluoric acid and hot phosphoric acid, it is inert to acids, bases, salts, and organic solvents, and is suitable for strong corrosive environments such as semiconductor etching and chemical reaction vessels.

High purity and low defects

The metal impurity content is ≤ 10ppm, and the hydroxyl content can be precisely controlled (JGS1 is about 2000ppm, JGS2 is about 100-200ppm, JGS3 is close to 0ppm), eliminating defects such as bubbles, stripes, and particle structures to ensure optical uniformity.

Excellent mechanical performance

Mohs hardness 6-7, compressive strength>1100MPa, flexural strength 67MPa, surface can be polished to mirror level (roughness Ra ≤ 0.5nm), meeting the requirements of high-precision optical systems.

Application scenarios

Semiconductors and Microelectronics

Exposure window of lithography machine: JGS1 quartz plate is used for 193nm ArF laser lithography, with a transmittance loss of less than 2%, ensuring chip process accuracy.

Wafer processing chamber: JGS3 quartz plate serves as an observation window for high-temperature annealing furnace, which can withstand continuous heating at 1100 ℃ to prevent metal impurities from contaminating the silicon wafer.

Plasma etching equipment: Customized square quartz plates are used for reaction chamber isolation, resistant to etching gases such as CF ₄ and SF ₆, and have a lifespan increased by more than three times.

Laser and Optical Communication

UV laser: JGS1 quartz plate serves as the resonant cavity end mirror, capable of withstanding high power density of 355nm laser (≥ 10MW/cm ²) with thermal distortion<λ/10.

Fiber preform: JGS3 quartz plate is used for depositing process substrates, and the infrared transmittance ensures temperature uniformity during the drawing process, reducing fiber loss to 0.18dB/km.

Spectral analyzer: Customized multi band composite quartz plate (JGS1+JGS2), achieving full spectrum transmission from 180-2500nm and increasing detection limit to ppb level.

Aerospace and Defense

Satellite optical system: JGS1 quartz plate is used for UV remote sensing camera windows, which can withstand space radiation (total dose ≥ 10 ⁷ rad) and atomic oxygen erosion, with a lifespan of over 15 years.

Missile seeker: JGS3 quartz plate serves as a protective cover for infrared detectors, with a transmittance of>85% @ 3-5 μ m and an impact resistance strength of>50J/m ².

Hypersonic aircraft: Customized square quartz plate for nose cone thermal protection, capable of withstanding aerodynamic heating at 2000 ℃, with a thermal conductivity of only 1.38W/(m · K) and a 40% increase in insulation efficiency.

Research and Medical Care

Synchrotron radiation light source: JGS1 quartz plate is used for the front window of the beamline, with a transmittance of>92% @ 0.1nm extreme ultraviolet band, supporting X-ray free electron laser experiments.

Deep UV disinfection equipment: Customized 254nm quartz plate as the mercury lamp encapsulation window, with a transmittance of over 85%, blocking the generation of ozone below 220nm to ensure operational safety.

Raman spectrometer: JGS2 quartz plate is used as the sample cell substrate, with a transmittance greater than 80% @ 785nm excitation light and a signal-to-noise ratio improvement of 20dB.

Customized service capability

Customization of size and shape

Supports processing of any square size within a thickness range of 5-80mm (minimum side length ≥ 10mm), with slotting, punching, and chamfering capabilities. The aperture accuracy is ± 0.01mm, and the positional accuracy is ≤ 0.05mm.

Example: Customize a 40mm × 40mm × 10mm square quartz plate for a semiconductor equipment supplier, with a center opening of 8mm through hole for vacuum chamber observation window.

Surface treatment process

Polishing grade: Double sided precision polishing to Ra ≤ 0.5nm, suitable for high-precision scenarios such as interferometers and laser cavities.

Matte grade: single-sided sandblasting treatment (roughness Ra=1-5 μ m), used for diffuse reflection lighting or anti glare display.

Coating service: We provide coatings such as anti reflective film (AR), reflective film (HR), and spectral film (BS), covering a wavelength range of 180nm-5 μ m.

Material formula optimization

Low hydroxyl customization: By vacuum dehydroxylation process, the hydroxyl content of JGS1 is reduced to below 500ppm, and the absorption peak intensity at 2730nm is reduced by 60%, which is suitable for 193nm lithography machine windows.

Doping modification: Adding elements such as TiO ₂ and Eu ₂ O3 to achieve specific wavelength band filtering (such as 220nm cutoff and 340nm narrowband transmission) for use in healthcare electric light sources.

Addressing industry pain points

Insufficient transmittance in the ultraviolet band: Traditional glass experiences a sharp drop in transmittance below 200nm, while JGS1 quartz plate breaks through the technical bottleneck, achieving a transmittance of 90% at 185nm, meeting the requirements of deep ultraviolet applications.

Uncontrolled deformation in high temperature environment: Ordinary quartz glass has a high coefficient of thermal expansion, and the JGS series reduces thermal distortion to λ through low hydroxyl design/ 20@632.8nm Ensure the stability of the laser system.

Corrosive medium penetration: Equipment in the chemical and semiconductor industries needs to be exposed to strong acids and alkalis for a long time. This product has better corrosion resistance than 316L stainless steel, and the maintenance cycle is extended to more than 5 years.

Difficulties in processing irregular structures: Traditional cutting techniques can easily cause quartz plates to break. By using laser precision processing technology, the yield rate can be increased to 98%, reducing the overall cost for customers.

Frequently Asked Questions

What are the differences between JGS1, JGS2, and JGS3 quartz glass?

JGS1 is synthetic quartz with the highest UV transmittance, suitable for deep-ultraviolet optics; JGS2 is transparent fused quartz containing trace amounts of air bubbles, suitable for visible light and near-ultraviolet applications; JGS3 is infrared quartz with low hydroxyl content and excellent infrared transmittance. We will recommend the most suitable material based on your spectral requirements.

What are the maximum dimensions of the square quartz plates you offer?

We support custom thicknesses ranging from 5 mm to 80 mm, and we can cut and edge-polish the plates to the dimensions specified in your drawings. Whether for small-batch prototyping or large-scale production, we can meet your specification requirements.

Can JGS1-3 square quartz plates withstand high temperatures or sudden temperature changes?

Yes. The softening points of JGS1 and JGS3 are approximately 1730°C, while that of JGS2 is approximately 1630°C; they can operate continuously at temperatures above 1100°C. Their coefficient of linear expansion is extremely low (approximately 5.4×10⁻⁷/°C). They will not shatter when heated to 1,100°C and then rapidly cooled to room temperature, making them suitable for use as observation windows in high-temperature furnaces, baffles in semiconductor diffusion furnaces, and optical isolation components in thermal shock environments. If your equipment involves rapid heating and cooling cycles, we recommend specifying the operating temperature range when selecting a product; we can then recommend the most suitable combination of material and thickness based on this information.

What is the typical lead time for custom products?

Standard specifications are typically in stock and available for immediate shipment. Custom products are usually delivered within 7–15 business days, depending on the complexity of the machining. For urgent orders, we offer expedited processing services.

Do you offer customization based on drawings and bulk supply?

We support customization based on your drawings and can machine square plates to your specified dimensions, thicknesses, hole positions, slots, and irregular contours according to the CAD drawings or samples you provide. We maintain stock of JGS1, JGS2, and JGS3 plates in standard thicknesses ranging from 5 to 80 mm. Sample orders can be delivered within 7–15 days, while delivery times for bulk orders are determined through consultation based on quantity and processing complexity. All shipped products come with material certificates and test reports to ensure batch consistency and traceability.

If you are interested in 5-80mm JGS1-3 high-purity UV square quartz plate, or have any customization needs, please feel free to contact us at any time.

Luverre Quartz is a manufacturer focusing on producing various quartz plates, we can produce customized quartz plates in different sizes and shapes, such as square, round, oval and other special shaped designs according to customer's requirements. The processing includes cutting, bending, welding, etc., and there are different colors available, such as transparent quartz plates, opaque quartz plates, milky quartz plates and so on.