T: +86-518-85528012
E: nick@luverrequartz.com
E: nick@luverrequartz.com
1st floor Runlian industrial center No. 116 QuFeng Rd., Haizhou Economic and technological development zone Lianyungang City, Jiangsu Province, China 222062
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Transparent large diameter quartz furnace tube
Transparent large-diameter quartz furnace tube is a tubular quartz glass product made of high-purity natural crystal or silica sand, melted at high temperature and precision processed.
LUVERRE quartz
99.99%
Inner with Vacuum PVC bag and then wrapped with air bubble film, outer with wooden box.
as per customer's requirement
Transparent large-diameter quartz furnace tube
Transparent large-diameter quartz furnace tube is a tubular quartz glass product made of high-purity natural crystal or silica sand, melted at high temperature and precision processed. Its core features are "high purity," "large diameter," and "excellent thermal performance," making it an essential basic consumable in high-end heat treatment processes, especially in semiconductor integrated circuit (IC) manufacturing and solar photovoltaic cell production.
Our product range covers various specifications from 6 inches (approximately 150mm) to 12 inches (3000mm) and even larger. The length can be customized according to customer process requirements, with uniform wall thickness and high internal surface finish, ensuring consistency and reliability of the process.
Core features:
Large diameter design: The diameter range covers 50mm to 500mm, meeting the needs of large-scale production or special experiments;
High transparency: With a transmittance of over 90% in the ultraviolet to infrared range (200-2500nm), it ensures visual monitoring of the manufacturing process;
High temperature resistance: can work stably in an environment of 1100 ℃ for a long time, and can withstand high temperatures of 1300 ℃ in the short term;
Low thermal expansion coefficient: excellent thermal stability, reducing the risk of high-temperature deformation;
Chemical inertness: Resistant to acid and alkali corrosion, avoiding reactions with process gases such as Cl ₂, NH ∝.
This product ensures the uniformity of the tube wall (± 0.1mm) through precision machining processes such as cold isostatic pressing and gas melting technology, effectively solving the problem of decreased process yield caused by uneven heating of traditional furnace tubes.
Application scenarios
Transparent large-diameter quartz furnace tubes, with their unique properties, have become key components in the following fields:
Semiconductor Manufacturing
Epitaxy: As a CVD (chemical vapor deposition) reaction chamber, it carries the deposition of epitaxial layers such as Si and GaAs, with high transparency for real-time observation of film uniformity.
Diffusion/oxidation process: Isolate the process gas from the heating element in a high-temperature diffusion furnace to prevent metal contamination and improve device reliability.
photovoltaic industry
PERC/TOPCon cell production: used for doping processes such as boron diffusion and phosphorus diffusion, with a large diameter design suitable for M10/G12 large-sized silicon wafers to improve single tube production capacity.
PECVD coating: As a quartz Bell Jar, it ensures the uniformity of amorphous silicon/silicon nitride film deposition.
LED and Display Technology
MOCVD (Metal Organic Chemical Vapor Deposition): As the core component of the reaction chamber in GaN based LED chip production, it is resistant to high temperature and high pressure environments and extends equipment maintenance cycles.
Research and Special Experiments
High temperature material synthesis: supports high-temperature sintering of nanomaterials, quantum dots, etc. in an inert atmosphere, and the transparency facilitates in-situ characterization (such as Raman spectroscopy analysis).
Optical device testing: As an optical window in high-temperature environments, it is used for the preparation and testing of laser crystals and fiber preforms.
Typical problem solutions:
Process pollution: high-purity quartz material avoids metal ion precipitation and reduces device leakage current;
Thermal stress cracking: Combining low thermal expansion coefficient with annealing process to eliminate residual stress in the tube body;
Capacity bottleneck: Large diameter design reduces the amount of single batch wafer loading and improves production efficiency by more than 30%.
Customized service
To meet the differentiated needs of different customers, we offer the following customization options:
Customization of size and shape
Adjust the diameter and length as needed (minimum inner diameter 20mm, maximum length 3000mm);
Support the design of irregular pipes (such as tapered pipes and pipes with flanged end caps).
Surface treatment process
Polishing treatment: Inner wall roughness Ra ≤ 0.2 μ m, reducing particle adhesion;
Coating service: Optional AR coating or corrosion-resistant coating to extend service life.
Integrated solution
Supporting quartz brackets, observation windows and other accessories to achieve integrated delivery of "furnace tube+fixture";
Provide thermal simulation analysis services, optimize pipe structure to match customer furnace design.
The transparent large-diameter quartz furnace tube, with high-performance materials and precision manufacturing technology as its core, provides a stable and reliable solution for high-temperature processes. Through customized services and full lifecycle technical support, we help customers break through production capacity limitations, improve product yield, and maintain a competitive advantage in high-end manufacturing fields such as semiconductors and photovoltaics.
Luverre Quartz manufactures and sells a wide range of high quality fused silica glass, including fused silica tubes, fused silica plates, fused silica rods, fused silica windows, fused silica crucibles, fused silica boats, fused silica flanges, fused silica beakers, fused silica glass instruments, and more. We can meet all kinds of customized requirements for fused silica glass products.
For more information, please feel free to contact us.
Why choose us?
1.We are more experienced.
We have over 18 years production experience of fused silica items.
2.We are more efficient.
We reply customers’ requests within 24 hours and we have high efficient production, engineers and sales team.
3.Our quality is more guaranteed.
We control the quality from fused silica lumps to fused silica sand and then fused silica products, we have better and stricter quality control than other manufactures.
4.We are able to produce more difficult fused silica products.
We have large grinding platforms and precision etching machines which enable us to produce large sizes of fused silica plates, tubes and high size precision fused silica items.
Transparent large-diameter quartz furnace tube
Transparent large-diameter quartz furnace tube is a tubular quartz glass product made of high-purity natural crystal or silica sand, melted at high temperature and precision processed. Its core features are "high purity," "large diameter," and "excellent thermal performance," making it an essential basic consumable in high-end heat treatment processes, especially in semiconductor integrated circuit (IC) manufacturing and solar photovoltaic cell production.
Our product range covers various specifications from 6 inches (approximately 150mm) to 12 inches (3000mm) and even larger. The length can be customized according to customer process requirements, with uniform wall thickness and high internal surface finish, ensuring consistency and reliability of the process.
Core features:
Large diameter design: The diameter range covers 50mm to 500mm, meeting the needs of large-scale production or special experiments;
High transparency: With a transmittance of over 90% in the ultraviolet to infrared range (200-2500nm), it ensures visual monitoring of the manufacturing process;
High temperature resistance: can work stably in an environment of 1100 ℃ for a long time, and can withstand high temperatures of 1300 ℃ in the short term;
Low thermal expansion coefficient: excellent thermal stability, reducing the risk of high-temperature deformation;
Chemical inertness: Resistant to acid and alkali corrosion, avoiding reactions with process gases such as Cl ₂, NH ∝.
This product ensures the uniformity of the tube wall (± 0.1mm) through precision machining processes such as cold isostatic pressing and gas melting technology, effectively solving the problem of decreased process yield caused by uneven heating of traditional furnace tubes.
Application scenarios
Transparent large-diameter quartz furnace tubes, with their unique properties, have become key components in the following fields:
Semiconductor Manufacturing
Epitaxy: As a CVD (chemical vapor deposition) reaction chamber, it carries the deposition of epitaxial layers such as Si and GaAs, with high transparency for real-time observation of film uniformity.
Diffusion/oxidation process: Isolate the process gas from the heating element in a high-temperature diffusion furnace to prevent metal contamination and improve device reliability.
photovoltaic industry
PERC/TOPCon cell production: used for doping processes such as boron diffusion and phosphorus diffusion, with a large diameter design suitable for M10/G12 large-sized silicon wafers to improve single tube production capacity.
PECVD coating: As a quartz Bell Jar, it ensures the uniformity of amorphous silicon/silicon nitride film deposition.
LED and Display Technology
MOCVD (Metal Organic Chemical Vapor Deposition): As the core component of the reaction chamber in GaN based LED chip production, it is resistant to high temperature and high pressure environments and extends equipment maintenance cycles.
Research and Special Experiments
High temperature material synthesis: supports high-temperature sintering of nanomaterials, quantum dots, etc. in an inert atmosphere, and the transparency facilitates in-situ characterization (such as Raman spectroscopy analysis).
Optical device testing: As an optical window in high-temperature environments, it is used for the preparation and testing of laser crystals and fiber preforms.
Typical problem solutions:
Process pollution: high-purity quartz material avoids metal ion precipitation and reduces device leakage current;
Thermal stress cracking: Combining low thermal expansion coefficient with annealing process to eliminate residual stress in the tube body;
Capacity bottleneck: Large diameter design reduces the amount of single batch wafer loading and improves production efficiency by more than 30%.
Customized service
To meet the differentiated needs of different customers, we offer the following customization options:
Customization of size and shape
Adjust the diameter and length as needed (minimum inner diameter 20mm, maximum length 3000mm);
Support the design of irregular pipes (such as tapered pipes and pipes with flanged end caps).
Surface treatment process
Polishing treatment: Inner wall roughness Ra ≤ 0.2 μ m, reducing particle adhesion;
Coating service: Optional AR coating or corrosion-resistant coating to extend service life.
Integrated solution
Supporting quartz brackets, observation windows and other accessories to achieve integrated delivery of "furnace tube+fixture";
Provide thermal simulation analysis services, optimize pipe structure to match customer furnace design.
The transparent large-diameter quartz furnace tube, with high-performance materials and precision manufacturing technology as its core, provides a stable and reliable solution for high-temperature processes. Through customized services and full lifecycle technical support, we help customers break through production capacity limitations, improve product yield, and maintain a competitive advantage in high-end manufacturing fields such as semiconductors and photovoltaics.
Luverre Quartz manufactures and sells a wide range of high quality fused silica glass, including fused silica tubes, fused silica plates, fused silica rods, fused silica windows, fused silica crucibles, fused silica boats, fused silica flanges, fused silica beakers, fused silica glass instruments, and more. We can meet all kinds of customized requirements for fused silica glass products.
For more information, please feel free to contact us.
Why choose us?
1.We are more experienced.
We have over 18 years production experience of fused silica items.
2.We are more efficient.
We reply customers’ requests within 24 hours and we have high efficient production, engineers and sales team.
3.Our quality is more guaranteed.
We control the quality from fused silica lumps to fused silica sand and then fused silica products, we have better and stricter quality control than other manufactures.
4.We are able to produce more difficult fused silica products.
We have large grinding platforms and precision etching machines which enable us to produce large sizes of fused silica plates, tubes and high size precision fused silica items.
