T: +86-518-85528012
E: nick@luverrequartz.com
E: nick@luverrequartz.com
1st floor Runlian industrial center No. 116 QuFeng Rd., Haizhou Economic and technological development zone Lianyungang City, Jiangsu Province, China 222062
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5-100mm thick porous quartz plate
Luverre Quartz manufactures and sells a wide range of high quality quartz glass
LUVERRE quartz
99.99%
Inner with Vacuum PVC bag and then wrapped with air bubble film, outer with wooden box.
as per customer's requirement
5-100mm thick porous quartz plate
Material and Structure
Matrix: 4N grade high-purity fused silica (SiO ₂ ≥ 99.99%), temperature resistance of 1100 ℃, extremely low thermal expansion coefficient (5.5 × 10 ⁻⁷⁷/℃) to ensure no cracking during quenching.
Pores: A three-dimensional interconnected microporous mesoporous network, with pore sizes ranging from 5 μ m to 5 mm that can be precisely controlled as needed, and an opening rate of 30% -70%.
Thickness: Regular stock sizes are 5, 10, 20, 30, 50, 80, and 100 mm, while other thicknesses can be customized with zero order quantity.
Size: The maximum effective area of a single piece is 600 mm × 600 mm; larger sizes are joined by non-destructive laser welding, with a joint strength of ≥ 85% of the base material.
Core performance
Chemical corrosion resistance: The mass loss of all inorganic acids, bases, and organic solvents except hydrofluoric acid is less than 0.1 mg/cm ⊃2; · h.
Breathability uniformity: The pressure difference between any two points on the same board is less than 3% (test conditions: air flow rate of 10 L/min).
Mechanical strength: three-point bending resistance ≥ 25 MPa (5 mm thick); ≥ 45 MPa (100 mm thick).
Cleanliness level: Factory grade 100 dust-free cleaning+vacuum double-layer packaging, metal impurities<5 ppm, meets semiconductor grade process requirements.
What pain points should be addressed
1. Uneven high-temperature gas distribution: Traditional metal or ceramic gas distribution plates are prone to deformation, oxidation, and pollution at temperatures greater than 800 ℃; Porous quartz plates can work for a long time at 1100 ℃ with a gas distribution of<± 3%.
2. Particle blockage and difficult cleaning: Quartz hardness level 7, smooth surface, easy to backwash or ultrasonic cleaning regeneration, lifespan>5000 cycles.
3. Thickness limit bottleneck: Commercial products generally have a thickness of ≤ 30 mm. This series breaks through a thickness of 100 mm and can be used for high-pressure differential deep filtration or large-scale temperature equalization support.
4. Lack of wafer level cleanliness: Electronic grade quartz raw materials+hundred level cleaning process, completely solving the problem of metal ion diffusion pollution.
Typical applications
Semiconductor/LPVD: A 50-100mm thick quartz plate is used as a vertical furnace uniform diffusion layer to ensure that the flow velocity difference of process gas on the surface of a 300mm wafer is less than 1%.
Photovoltaic diffusion furnace: 5-10 mm thin plates are used for uniform distribution of POCl ∝ sources, improving the uniformity of square resistance by more than 8%.
Sodium ion/lithium battery research and development: 20-30 mm thickness used as fluidized bed electrode support plate, resistant to fluoride electrolyte corrosion, with a cycle life of>1000 hours.
High purity chemical filtration: 80-100 mm thickness for submicron particle filtration, initial pressure drop<5 kPa, filtration efficiency>99.9%.
Optics/Laser: Customized microporous smooth surface composite structure, used as a porous electrode or diffusion cooling element for gas lasers.
Customized service
1. Pore size and pore gradient: A gradient pore structure of 5 μ m surface layer+2 mm core is implemented on the same plate to solve the compatibility problem between surface interception and deep pollution containment.
2. Shape processing: laser cutting, water guided laser, CNC precision carving, capable of processing circular, square, circular, and irregular hole arrays; Edge chamfers, steps, and threads are all available.
3. Surface functionalization:
Hydrophilic/hydrophobic coating: contact angle adjustable from 15 ° to 110 °;
Metal/oxide coating: Ti, Pt, ITO, etc., with a thickness of 50 nm-2 μ m.
Whether you are seeking ultra-high temperature gas distribution, ultra-high purity filtration, or microstructured functional quartz carriers, 5-100mm thick porous quartz plates can provide a "four-dimensional" customized solution for material, thickness, pore structure, and cleanliness, providing solid guarantees for your process stability and product yield. Welcome to call and send pictures, start exclusive customization immediately!
Luverre Quartz manufactures and sells a wide range of high quality quartz glass, including quartz tubes, quartz plates, quartz rods, quartz windows, quartz crucibles, quartz boats, quartz flanges, quartz beakers, quartz glass instruments, and more. We can meet all kinds of customized requirements for quartz glass products.
For more information, please feel free to contact us.
Why choose us?
1.We are more experienced.
We have over 18 years production experience of quartz items.
2.We are more efficient.
We reply customers’ requests within 24 hours and we have high efficient production, engineers and sales team.
3.Our quality is more guaranteed.
We control the quality from quartz lumps to quartz sand and then quartz products, we have better and stricter quality control than other manufactures.
4.We are able to produce more difficult quartz products.
We have large grinding platforms and precision etching machines which enable us to produce large sizes of quartz plates, tubes and high size precision quartz items.
5-100mm thick porous quartz plate
Material and Structure
Matrix: 4N grade high-purity fused silica (SiO ₂ ≥ 99.99%), temperature resistance of 1100 ℃, extremely low thermal expansion coefficient (5.5 × 10 ⁻⁷⁷/℃) to ensure no cracking during quenching.
Pores: A three-dimensional interconnected microporous mesoporous network, with pore sizes ranging from 5 μ m to 5 mm that can be precisely controlled as needed, and an opening rate of 30% -70%.
Thickness: Regular stock sizes are 5, 10, 20, 30, 50, 80, and 100 mm, while other thicknesses can be customized with zero order quantity.
Size: The maximum effective area of a single piece is 600 mm × 600 mm; larger sizes are joined by non-destructive laser welding, with a joint strength of ≥ 85% of the base material.
Core performance
Chemical corrosion resistance: The mass loss of all inorganic acids, bases, and organic solvents except hydrofluoric acid is less than 0.1 mg/cm ⊃2; · h.
Breathability uniformity: The pressure difference between any two points on the same board is less than 3% (test conditions: air flow rate of 10 L/min).
Mechanical strength: three-point bending resistance ≥ 25 MPa (5 mm thick); ≥ 45 MPa (100 mm thick).
Cleanliness level: Factory grade 100 dust-free cleaning+vacuum double-layer packaging, metal impurities<5 ppm, meets semiconductor grade process requirements.
What pain points should be addressed
1. Uneven high-temperature gas distribution: Traditional metal or ceramic gas distribution plates are prone to deformation, oxidation, and pollution at temperatures greater than 800 ℃; Porous quartz plates can work for a long time at 1100 ℃ with a gas distribution of<± 3%.
2. Particle blockage and difficult cleaning: Quartz hardness level 7, smooth surface, easy to backwash or ultrasonic cleaning regeneration, lifespan>5000 cycles.
3. Thickness limit bottleneck: Commercial products generally have a thickness of ≤ 30 mm. This series breaks through a thickness of 100 mm and can be used for high-pressure differential deep filtration or large-scale temperature equalization support.
4. Lack of wafer level cleanliness: Electronic grade quartz raw materials+hundred level cleaning process, completely solving the problem of metal ion diffusion pollution.
Typical applications
Semiconductor/LPVD: A 50-100mm thick quartz plate is used as a vertical furnace uniform diffusion layer to ensure that the flow velocity difference of process gas on the surface of a 300mm wafer is less than 1%.
Photovoltaic diffusion furnace: 5-10 mm thin plates are used for uniform distribution of POCl ∝ sources, improving the uniformity of square resistance by more than 8%.
Sodium ion/lithium battery research and development: 20-30 mm thickness used as fluidized bed electrode support plate, resistant to fluoride electrolyte corrosion, with a cycle life of>1000 hours.
High purity chemical filtration: 80-100 mm thickness for submicron particle filtration, initial pressure drop<5 kPa, filtration efficiency>99.9%.
Optics/Laser: Customized microporous smooth surface composite structure, used as a porous electrode or diffusion cooling element for gas lasers.
Customized service
1. Pore size and pore gradient: A gradient pore structure of 5 μ m surface layer+2 mm core is implemented on the same plate to solve the compatibility problem between surface interception and deep pollution containment.
2. Shape processing: laser cutting, water guided laser, CNC precision carving, capable of processing circular, square, circular, and irregular hole arrays; Edge chamfers, steps, and threads are all available.
3. Surface functionalization:
Hydrophilic/hydrophobic coating: contact angle adjustable from 15 ° to 110 °;
Metal/oxide coating: Ti, Pt, ITO, etc., with a thickness of 50 nm-2 μ m.
Whether you are seeking ultra-high temperature gas distribution, ultra-high purity filtration, or microstructured functional quartz carriers, 5-100mm thick porous quartz plates can provide a "four-dimensional" customized solution for material, thickness, pore structure, and cleanliness, providing solid guarantees for your process stability and product yield. Welcome to call and send pictures, start exclusive customization immediately!
Luverre Quartz manufactures and sells a wide range of high quality quartz glass, including quartz tubes, quartz plates, quartz rods, quartz windows, quartz crucibles, quartz boats, quartz flanges, quartz beakers, quartz glass instruments, and more. We can meet all kinds of customized requirements for quartz glass products.
For more information, please feel free to contact us.
Why choose us?
1.We are more experienced.
We have over 18 years production experience of quartz items.
2.We are more efficient.
We reply customers’ requests within 24 hours and we have high efficient production, engineers and sales team.
3.Our quality is more guaranteed.
We control the quality from quartz lumps to quartz sand and then quartz products, we have better and stricter quality control than other manufactures.
4.We are able to produce more difficult quartz products.
We have large grinding platforms and precision etching machines which enable us to produce large sizes of quartz plates, tubes and high size precision quartz items.
