T: +86-518-85528012
E: nick@luverrequartz.com
E: nick@luverrequartz.com
1st floor Runlian industrial center No. 116 QuFeng Rd., Haizhou Economic and technological development zone Lianyungang City, Jiangsu Province, China 222062
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Anti plasma erosion semiconductor quartz tube
Anti plasma erosion semiconductor quartz tube is a key material specifically used in semiconductor manufacturing processes, mainly for equipment component protection in plasma environments.
Inner with Vacuum PVC bag and then wrapped with air bubble film, outer with wooden box.
Anti plasma erosion semiconductor quartz tube
Anti plasma erosion semiconductor quartz tube is a key material specifically used in semiconductor manufacturing processes, mainly for equipment component protection in plasma environments. It is usually made of high-purity quartz glass and undergoes special surface treatment or coating processes to enhance its corrosion resistance and stability in plasma environments.
Characteristic
-High purity quartz glass: Made from high-purity silicon dioxide (SiO ₂) as raw material, it has excellent chemical stability and low impurity content, ensuring performance in high temperature and high vacuum environments.
-Anti plasma erosion: By using special coating or surface treatment techniques such as nanodiamond coating, ceramic coating, or fluoride coating, the anti plasma erosion ability of quartz tubes is significantly improved.
-High temperature resistance: capable of stable operation in high temperature environments ranging from 1000 ℃ to 1600 ℃, meeting the requirements of semiconductor manufacturing processes.
-Low thermal expansion coefficient: The thermal expansion coefficient of quartz glass is extremely low, which can maintain dimensional stability and reduce thermal stress when temperature changes.
-High transparency: It has good transparency to ultraviolet and visible light, and is suitable for processes such as photolithography and photochemical reactions.
Application
Anti plasma erosion semiconductor quartz tubes have a wide range of applications in the field of semiconductor manufacturing, mainly including the following aspects:
1. Plasma etching equipment
-Etching chamber components: used to protect key components inside the etching chamber, such as electrodes, gas distribution plates, and reaction chamber walls, to prevent plasma erosion of quartz materials.
-Etching mask and photomask: During the photolithography process, quartz tubes can be used to protect the photomask from plasma damage.
2. Chemical vapor deposition (CVD) equipment
-Deposition chamber: During plasma enhanced chemical vapor deposition (PECVD) and low-pressure chemical vapor deposition (LPCVD) processes, quartz tubes can be used to protect the deposition chamber, ensuring the stability and uniformity of the deposition process.
-Gas transport pipeline: used to transport reaction gases to prevent contamination or reaction with chamber materials during transportation.
3. Lithography equipment
-UV transparent components: The high transparency of quartz tubes makes them suitable for UV transparent components in lithography equipment, such as lenses, masks, and light pipes.
-Photolithography mask protection: During the lithography process, quartz tubes can be used to protect the lithography mask and prevent plasma damage to the mask.
4. Semiconductor cleaning equipment
-Cleaning chamber components: During plasma cleaning, quartz tubes can be used to protect key components inside the cleaning chamber and prevent plasma from corroding quartz materials.
-Cleaning gas distribution system: used to transport cleaning gas to ensure the efficiency and uniformity of the cleaning process.
5. Research and experimental equipment
-Plasma experimental setup: In plasma physics research and experiments, quartz tubes can be used to construct plasma reaction chambers and protect experimental equipment from plasma erosion.
-Material synthesis and processing: During material synthesis and processing, quartz tubes can be used to protect reaction vessels and heating elements, ensuring the stability and safety of experiments.
Customized description
Anti plasma erosion semiconductor quartz tubes can be customized according to the specific needs of users. The following are some common customization options:
1. Size and shape
-Inner and outer diameters: Quartz tubes with different inner and outer diameters can be customized according to user needs. The inner diameter range is usually from a few millimeters to tens of centimeters, while the outer diameter is determined according to specific applications.
-Length: Quartz tubes of different lengths can be customized according to equipment size and process requirements, typically ranging from a few centimeters to a few meters in length.
-Shape: In addition to standard cylindrical tubes, special shaped quartz tubes such as conical tubes, curved tubes, or multi-stage variable diameter tubes can also be customized to meet complex process requirements.
2. Coating and surface treatment
-Anti plasma coating: Various anti plasma coatings can be selected, such as nanodiamond coating, ceramic coating, or fluoride coating, to improve the corrosion resistance and erosion resistance of quartz tubes.
-Surface polishing: Both the inner and outer surfaces can be subjected to high-precision polishing treatment to reduce surface defects and residual impurities, and improve the optical performance and chemical stability of quartz tubes.
-Anti reflection coating: In applications that require high optical transparency, an anti reflection coating can be applied to the surface of quartz tubes to reduce light reflection loss.
3. Purity and impurity control
-High purity quartz glass: Provides high-purity quartz glass tubes with extremely low impurity content, ensuring high purity requirements in the semiconductor manufacturing process.
-Specific impurity control: The content of specific impurities (such as hydroxide ions, metal ions, etc.) can be controlled according to user needs to meet the requirements of specific processes.
4. High temperature resistance and corrosion resistance
-High temperature performance optimization: By using special manufacturing processes, the high temperature resistance of quartz tubes is improved to ensure their stability in high-temperature plasma environments.
-Corrosion resistance: Quartz glass itself has good chemical stability, but its corrosion resistance can be further optimized according to user needs to cope with environments such as strong acids, strong bases, or organic solvents.
5. Special requirements
-Customized packaging: Provide customized packaging and transportation solutions according to user needs to ensure the safety of quartz tubes during transportation.
-Quality certification: We can provide quality certification that complies with international standards (such as ISO 9001) to ensure the quality and consistency of our products.
-Customized testing: Provide customized testing services based on user needs, including high temperature resistance testing, corrosion resistance testing, and plasma erosion resistance testing, to ensure that the performance of quartz tubes meets specific process requirements.
By customizing anti plasma erosion semiconductor quartz tubes, different semiconductor manufacturing processes and application requirements can be better met, improving equipment stability and service life, while ensuring the efficiency and reliability of the semiconductor manufacturing process.
For more information, please feel free to contact us.
Why choose us?
1.We are more experienced.
We have over 18 years production experience of quartz items.
2.We are more efficient.
We reply customers’ requests within 24 hours and we have high efficient production, engineers and sales team.
3.Our quality is more guaranteed.
We control the quality from quartz lumps to quartz sand and then quartz products, we have better and stricter quality control than other manufactures.
4.We are able to produce more difficult quartz products.
We have large grinding platforms and precision etching machines which enable us to produce large sizes of quartz plates, tubes and high size precision quartz items.
Anti plasma erosion semiconductor quartz tube
Anti plasma erosion semiconductor quartz tube is a key material specifically used in semiconductor manufacturing processes, mainly for equipment component protection in plasma environments. It is usually made of high-purity quartz glass and undergoes special surface treatment or coating processes to enhance its corrosion resistance and stability in plasma environments.
Characteristic
-High purity quartz glass: Made from high-purity silicon dioxide (SiO ₂) as raw material, it has excellent chemical stability and low impurity content, ensuring performance in high temperature and high vacuum environments.
-Anti plasma erosion: By using special coating or surface treatment techniques such as nanodiamond coating, ceramic coating, or fluoride coating, the anti plasma erosion ability of quartz tubes is significantly improved.
-High temperature resistance: capable of stable operation in high temperature environments ranging from 1000 ℃ to 1600 ℃, meeting the requirements of semiconductor manufacturing processes.
-Low thermal expansion coefficient: The thermal expansion coefficient of quartz glass is extremely low, which can maintain dimensional stability and reduce thermal stress when temperature changes.
-High transparency: It has good transparency to ultraviolet and visible light, and is suitable for processes such as photolithography and photochemical reactions.
Application
Anti plasma erosion semiconductor quartz tubes have a wide range of applications in the field of semiconductor manufacturing, mainly including the following aspects:
1. Plasma etching equipment
-Etching chamber components: used to protect key components inside the etching chamber, such as electrodes, gas distribution plates, and reaction chamber walls, to prevent plasma erosion of quartz materials.
-Etching mask and photomask: During the photolithography process, quartz tubes can be used to protect the photomask from plasma damage.
2. Chemical vapor deposition (CVD) equipment
-Deposition chamber: During plasma enhanced chemical vapor deposition (PECVD) and low-pressure chemical vapor deposition (LPCVD) processes, quartz tubes can be used to protect the deposition chamber, ensuring the stability and uniformity of the deposition process.
-Gas transport pipeline: used to transport reaction gases to prevent contamination or reaction with chamber materials during transportation.
3. Lithography equipment
-UV transparent components: The high transparency of quartz tubes makes them suitable for UV transparent components in lithography equipment, such as lenses, masks, and light pipes.
-Photolithography mask protection: During the lithography process, quartz tubes can be used to protect the lithography mask and prevent plasma damage to the mask.
4. Semiconductor cleaning equipment
-Cleaning chamber components: During plasma cleaning, quartz tubes can be used to protect key components inside the cleaning chamber and prevent plasma from corroding quartz materials.
-Cleaning gas distribution system: used to transport cleaning gas to ensure the efficiency and uniformity of the cleaning process.
5. Research and experimental equipment
-Plasma experimental setup: In plasma physics research and experiments, quartz tubes can be used to construct plasma reaction chambers and protect experimental equipment from plasma erosion.
-Material synthesis and processing: During material synthesis and processing, quartz tubes can be used to protect reaction vessels and heating elements, ensuring the stability and safety of experiments.
Customized description
Anti plasma erosion semiconductor quartz tubes can be customized according to the specific needs of users. The following are some common customization options:
1. Size and shape
-Inner and outer diameters: Quartz tubes with different inner and outer diameters can be customized according to user needs. The inner diameter range is usually from a few millimeters to tens of centimeters, while the outer diameter is determined according to specific applications.
-Length: Quartz tubes of different lengths can be customized according to equipment size and process requirements, typically ranging from a few centimeters to a few meters in length.
-Shape: In addition to standard cylindrical tubes, special shaped quartz tubes such as conical tubes, curved tubes, or multi-stage variable diameter tubes can also be customized to meet complex process requirements.
2. Coating and surface treatment
-Anti plasma coating: Various anti plasma coatings can be selected, such as nanodiamond coating, ceramic coating, or fluoride coating, to improve the corrosion resistance and erosion resistance of quartz tubes.
-Surface polishing: Both the inner and outer surfaces can be subjected to high-precision polishing treatment to reduce surface defects and residual impurities, and improve the optical performance and chemical stability of quartz tubes.
-Anti reflection coating: In applications that require high optical transparency, an anti reflection coating can be applied to the surface of quartz tubes to reduce light reflection loss.
3. Purity and impurity control
-High purity quartz glass: Provides high-purity quartz glass tubes with extremely low impurity content, ensuring high purity requirements in the semiconductor manufacturing process.
-Specific impurity control: The content of specific impurities (such as hydroxide ions, metal ions, etc.) can be controlled according to user needs to meet the requirements of specific processes.
4. High temperature resistance and corrosion resistance
-High temperature performance optimization: By using special manufacturing processes, the high temperature resistance of quartz tubes is improved to ensure their stability in high-temperature plasma environments.
-Corrosion resistance: Quartz glass itself has good chemical stability, but its corrosion resistance can be further optimized according to user needs to cope with environments such as strong acids, strong bases, or organic solvents.
5. Special requirements
-Customized packaging: Provide customized packaging and transportation solutions according to user needs to ensure the safety of quartz tubes during transportation.
-Quality certification: We can provide quality certification that complies with international standards (such as ISO 9001) to ensure the quality and consistency of our products.
-Customized testing: Provide customized testing services based on user needs, including high temperature resistance testing, corrosion resistance testing, and plasma erosion resistance testing, to ensure that the performance of quartz tubes meets specific process requirements.
By customizing anti plasma erosion semiconductor quartz tubes, different semiconductor manufacturing processes and application requirements can be better met, improving equipment stability and service life, while ensuring the efficiency and reliability of the semiconductor manufacturing process.
For more information, please feel free to contact us.
Why choose us?
1.We are more experienced.
We have over 18 years production experience of quartz items.
2.We are more efficient.
We reply customers’ requests within 24 hours and we have high efficient production, engineers and sales team.
3.Our quality is more guaranteed.
We control the quality from quartz lumps to quartz sand and then quartz products, we have better and stricter quality control than other manufactures.
4.We are able to produce more difficult quartz products.
We have large grinding platforms and precision etching machines which enable us to produce large sizes of quartz plates, tubes and high size precision quartz items.
