High precision quartz plate with slotted middle

In the fields of semiconductor lithography, precision optical measurement, and microfluidic chip packaging, the flatness, slot position accuracy, and material purity of the substrate directly determine the success or failure of the process. A high-precision quartz plate is slotted in the middle, using high-purity quartz as the base. Through CNC machining and precision annealing processes, micrometer sized rectangular, circular or irregular grooves/blind grooves are achieved at the center of the plate. It combines the high transparency, low expansion, high temperature resistance, and insulation properties of quartz, providing an ideal platform for precision component positioning, optical path alignment, and fluid sealing with "zero deformation and no pollution".

FAQ: Frequently Asked Questions for Users

Q1: What is the dimensional accuracy of slotting?

A: We use a five axis CNC machining center and laser assisted cutting technology, with groove width tolerance controlled within ± 0.02mm, groove depth tolerance within ± 0.01mm, and positional deviation not exceeding ± 0.03mm, meeting the strict requirements of precision assembly and optical alignment.

Q2: Is the slotted plate prone to internal stress or deformation?

A: All products undergo gradient annealing treatment (up to 1200 ℃) after rough processing to completely eliminate mechanical stress. The flatness of the plate can be stabilized within 0.05mm/m, and even when used in hot environments above 200 ℃, the rate of change in slot size is less than 0.01%.

Q3: Can asymmetric groove or stepped groove be processed?

A: Fully supported. We can customize rectangular slots, U-shaped slots, dovetail slots, through/blind slots, stepped slots, and combined irregular slots, and provide additional processing such as chamfering, bottom polishing, or threaded holes to meet special needs such as chip packaging and fiber array fixation.

Product Core Value: Addressing the Three Major Challenges for Users

1. Solve the problem of "inaccurate positioning of precision components" - with micrometer level slotting accuracy, ensure that chips, optical components, or sensors are always in the design position during thermal cycling, and prevent offset failure.

2. Solve the problem of "material deformation affecting optical/flow paths" - high-purity quartz with extremely low thermal expansion coefficient+precision annealing, ensuring long-term stability of groove size and flatness under temperature fluctuations or vacuum environments.

3. Addressing the risk of "pollution and insufficient insulation" - Quartz is a natural insulator with no metal ion precipitation, suitable for high cleanliness scenarios such as semiconductor front-end processes and biomedical testing.

Product advantages and application value

1、 Precision machining capability to meet high-end manufacturing needs

-Micron level slot accuracy: Equipped with a high-precision optical positioning system, the slot position, size, and verticality are fully online detected to ensure consistency of batch products.

-Complex groove integrated molding: Multiple independent groove positions, step grooves, or a combination structure of through grooves and positioning holes can be achieved on a single plate, reducing the number of assembly parts and improving system integration.

-Diversified surface treatment: The groove can provide frosted surface (enhancing adhesion), mirror polishing (reducing light scattering) or coating treatment to meet different functional requirements.

2、 Material performance advantages ensure long-term reliability

-Thermal stability: suitable for extreme processes such as high-temperature curing and low-temperature testing, with a temperature range of -200 ℃ to 1100 ℃.

-Optical characteristics: High transparency in the ultraviolet to infrared wavelength range, the slotted area can be directly used as an optical window to avoid errors introduced by secondary assembly.

-Chemical inertness: resistant to strong acids and solvents, reusable after cleaning, reducing long-term operating costs.

3、 Ultimate customization service, covering research and development to mass production

-Size range: Length 50mm to 1200mm, Width 50mm to 800mm, Thickness 2mm to 50mm.

-Slot forms: single slot, array slot, cross slot, annular slot, countersunk slot, etc., designed as needed.

Typical application scenarios and customer cases

Application scenarios

-Semiconductor equipment: wafer carrier, photolithography mask positioning substrate

-Optoelectronic packaging: laser array coupling base, fiber array alignment fixture

-Biochips: Microfluidic reaction plates, cell culture observation platforms

-Precision instruments: spectrometer sample cell, positioning plate inside vacuum chamber

Case: A globally leading optical module manufacturer's "400G Optical Engine Coupling Substrate" project

Challenge: The customer needs to process 8 sets of precision rectangular slots spaced 5mm apart on a 120mm × 60mm × 8mm quartz plate for fixing laser chips and lens arrays. The groove width tolerance is required to be ± 0.01mm, the groove bottom flatness is 0.01mm, and the groove displacement after reflow soldering at 260 ℃ should not exceed 2 microns. Previously, the use of ceramic substrates resulted in a decrease in coupling efficiency due to mismatched thermal expansion coefficients.

Solution: We use low hydroxyl high-purity quartz blanks, first perform double-sided grinding to a flatness of 0.01mm, then mill the slots one by one with a five axis machining center, and finally perform a 72 hour gradient annealing. Each set of slots is fully inspected by an imaging system and a coordinate report is issued.

Effect: After product delivery, the coupling efficiency of the customer's optical engine increased by 12%, and the pass rate after reflow soldering increased from 89% to 98.5%. This solution has been adopted as the standard substrate design for the new generation of 800G optical modules and has achieved a cumulative supply of over 3000 pieces.

Is your precision assembly or optical alignment limited by insufficient substrate accuracy? We provide full process customization services from drawings to finished products, ensuring that every slot is precise to the micrometer. Contact us immediately to obtain your exclusive technical solution and quotation for "high-precision quartz plate with middle slot".

Luverre Quartz manufactures and sells a wide range of high quality fused quartz glass, including fused quartz tubes, fused quartz plates, fused quartz rods, fused quartz windows, fused quartz crucibles, fused quartz boats, fused quartz flanges, fused quartz beakers, fused quartz glass instruments, and more. We can meet all kinds of customized requirements for fused quartz glass products.

For more information, please feel free to contact us.