The 100-800mm high transparency semi-circular quartz boat is a high-performance carrier tool made of high-purity quartz glass (SiO ₂ content ≥ 99.99%) through precision processing. Its unique semi-circular structure design combined with the excellent physical and chemical properties of quartz materials provides a reliable solution for precision manufacturing fields such as semiconductors, photovoltaics, and LEDs.

Core Features

Excellent optical performance: With a transmittance of over 92% (wavelength range of 200-2500nm), it ensures uniform energy transfer in photolithography, diffusion, and other processes, reducing process fluctuations.

High temperature stability: It can withstand a high temperature environment of 1100 ℃ for a long time, with a short-term use temperature of up to 1450 ℃, and is suitable for extreme process conditions such as rapid thermal annealing (RTA).

Excellent chemical inertness: It has corrosion resistance to all acids, bases, and organic solvents except hydrofluoric acid (HF), avoiding the risk of process pollution.

Structural accuracy guarantee: Through CNC machining, the dimensional tolerance is ± 0.05mm, and the surface roughness Ra is ≤ 0.2 μ m, ensuring perfect matching with the process equipment.

Outstanding mechanical strength: The bending strength reaches 60-80MPa, and the thermal shock resistance is excellent (Δ T ≥ 120 ℃ without rupture), extending the product's service life.

Technical advantage

Compared to traditional circular quartz boats, the semi-circular design increases loading capacity by 30% while reducing the impact of edge effects

The support structure of the patented design ensures a more uniform distribution of stress on the chip, reducing the fragmentation rate to below 0.02%

Surface plasma treatment technology achieves superhydrophobic properties, improves cleaning efficiency by 50%, and reduces the risk of process interruption

Typical application scenarios

In the field of semiconductor manufacturing:

Lithography process: As a 12 inch wafer exposure carrier, it is used in conjunction with a deep ultraviolet (DUV) lithography machine to ensure uniform coating of photoresist

Diffusion process: Carrying silicon wafers in a phosphorus/boron diffusion furnace to achieve precise control of impurity concentration gradient (± 1% accuracy)

CVD deposition: As an alternative to graphite boats, it is directly used for depositing silicon nitride films in PECVD equipment, reducing the risk of metal contamination

Photovoltaic industry applications:

PERC cell production: Carrying M6 size silicon wafers in the back passivation process, and using ALD equipment to achieve Al ₂ O ∝/SiNx stacked deposition

TOPCon Battery Manufacturing: As a boron diffusion carrier, it can withstand POCl ∝ high-temperature diffusion environment and has a service life of over 200 times

HJT battery process: Provide clean carriers during the amorphous silicon deposition stage to ensure film uniformity (± 1.5% thickness deviation)

LED and Display Industry:

MOCVD equipment: As a 4/6-inch sapphire substrate carrier, it achieves GaN epitaxial layer growth thickness uniformity of<3%

Quantum dot display: Carrying glass substrate in QD solution coating process to ensure uniform dispersion of nanoparticles

Micro LED Mass Transfer: As a temporary carrier, it achieves precise positioning of millions of chips, with a transfer yield rate of over 99.99%

Other fields:

Any special scenario that requires high temperature, high purity, and transparent environment, such as laser technology, infrared applications, and lighting industry.

Customized service system

Dimensions: L100-800 × W50-300 × H20-100mm

Load capacity: 20-500 pieces (2-12 inches)

Transmittance band: 190-3500nm (customized coating)

Surface treatment: anti reflective coating/hydrophobic coating

Structural form: double-layer/stepped/with positioning groove design

Frequently Asked Questions (FAQ)

What is the maximum operating temperature of this semi-circular quartz boat?

Our product can operate stably in environments up to 1100℃ for long periods, with short-term resistance reaching 1250℃, meeting the demands of most high-temperature processes.

Do you support non-standard size customization?

Yes. In addition to standard specifications from 100-800mm, we can fully customize dimensions based on your drawings or specific parameters, including arc radius, wall thickness, and slot positions.

How does the high-transmittance feature specifically benefit the process?

High light transmittance ensures that heat from heating elements radiates evenly onto the wafer or sample surface. This reduces thermal stress, thereby improving the uniformity and yield of thin-film growth.

What is the typical lead time for delivery?

Standard specifications are often in stock for quick shipment. For customized products, the production cycle is generally 7-15 working days, depending on complexity.

Choosing our high transparency semi-circular quartz boat is not only about choosing a product, but also about choosing a commitment to excellent quality, efficient craftsmanship, and reliable cooperation. Feel free to contact us anytime to discuss your specific needs.

Luverre Quartz manufactures and sells a wide range of high quality quartz glass, including quartz tubes, quartz plates, quartz rods, quartz windows, quartz crucibles, quartz boats, quartz flanges, quartz beakers, quartz glass instruments, and more. We can meet all kinds of customized requirements for quartz glass products.